Method for preparing plasma-oriented tungsten coating used in fusion reactor by using tungsten carbonyl as precursor

A plasma, carbonyl tungsten technology, applied in coatings, metal material coating processes, gaseous chemical plating, etc., can solve the problems of large residual stress, high reaction temperature, and high oxygen content in the coating, so as to solve the problem of residual stress. , The effect of low residual stress of coating and smooth surface of coating

Inactive Publication Date: 2011-08-03
JINGDEZHEN CERAMIC UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The tungsten coating prepared by PS has the disadvantages of low bonding strength, low thermal conductivity, high porosity, and high oxygen content; PVD is difficult to prepare thick coatings, the purity is difficult to control, and the cost is relatively high
When using ordinary CVD to prepare tungsten coating, H 2 Reduced tungsten halide (WCl 6 , WF 6 etc.), the product of this reaction is highly corrosive to the equipment and the reaction temperature is high, the residual stress of the coating is large, and the copper alloy (CuCrZr alloy) substrate is damaged during the deposition process. At the same time, chloride ions and fluorine ions will pollute the coating. intergranular corrosion

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0015] The CuCrZr alloy is processed into a sample size of 50mm × 50mm × 5mm. Before deposition, it was polished and polished with No. 150, No. 600, No. 800, No. 1000, and No. 1500 sandpaper in sequence, and then the deposition surface was degreased with acetone, ultrasonically cleaned with absolute ethanol, and dehydrated and dried. Put the sample on the heating seat of the reactor for deposition, the substrate temperature is controlled at 200°C, the reactor pressure is constant at 100Pa, the gas flow rate of tungsten carbonyl is 1.5mL / s and the temperature is controlled at 80°C, after deposition for 5h, keep warm for 3h for annealing .

Embodiment 2

[0017] The CuCrZr alloy is processed into a sample size of 50mm × 50mm × 5mm. Before deposition, it was polished and polished with No. 150, No. 600, No. 800, No. 1000, and No. 1500 sandpaper in sequence, and then the deposition surface was degreased with acetone, ultrasonically cleaned with absolute ethanol, and dehydrated and dried. Put the sample on the heating seat of the reactor for deposition, the substrate temperature is controlled at 300°C, the reactor pressure is constant at 150Pa, the gas flow rate of tungsten carbonyl is 2.0mL / s and the temperature is controlled at 80°C, after 6h of deposition, keep warm for 3h for annealing .

Embodiment 3

[0019] The CuCrZr alloy is processed into a sample size of 50mm × 50mm × 5mm. Before deposition, it was polished and polished with No. 150, No. 600, No. 800, No. 1000, and No. 1500 sandpaper in sequence, and then the deposition surface was degreased with acetone, ultrasonically cleaned with absolute ethanol, and dehydrated and dried. Put the sample on the heating seat of the reactor for deposition, the substrate temperature is controlled at 400°C, the reactor pressure is constant at 200Pa, the gas flow rate of tungsten carbonyl is 2.0mL / s and the temperature is controlled at 90°C, after 7h of deposition, keep warm for 4h for annealing .

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Abstract

The invention provides a method for preparing a plasma-oriented tungsten coating used in a fusion reactor by using tungsten carbonyl as precursor and using a plasma-enhanced metal organic chemical vapor deposition method. During a deposition reaction, the interlayer of a reactor is cooled through always introducing cooling water to the interlayer, the pressure is constant to be 150-250Pa, and thetemperature of a base is controlled to be 200-600 DEG C; saturated tungsten carbonyl vapor of which the purity is 99.9% is introduced, wherein the air flow is controlled to be 1.0-3.0ml / s, and the temperature ranges from 70 to 140 DEG C; and the deposition is carried out for 5-12 hours, and thermal diffusion annealing is carried out 3-6 hours after constant heat insulation. The method disclosed by the invention can be used for preparing tungsten coatings having high bonding strength with a base, and the coatings are less than 5mm in thickness and have the characteristics of low porosity, highpurity, smooth surface and the like. The method is relatively simple in process, has high reliability and can prepare large-area tungsten coatings, thereby being widely applied to a fusion reactor experimental facility and the first wall of a future fusion reactor.

Description

technical field [0001] The invention relates to a first wall part of a nuclear fusion device, in particular to a method for preparing a plasma-facing tungsten coating used in a fusion reactor by using tungsten carbonyl as a precursor. Background technique [0002] Now that the International Thermonuclear Experimental Reactor (ITER) has been built in France, research on plasma-oriented materials suitable for ITER and future commercial fusion reactors is an urgent problem that needs to be solved, and it is directly related to whether commercial power generation of fusion reactors can be realized in the future . [0003] After a lot of research, it has been proved that the currently recognized and optional plasma-oriented materials mainly include high-Z (atomic number) tungsten, molybdenum and their alloy materials and low-Z C / C composite materials, B4C materials, SiC materials and Be materials. Wait. C / C composite material is a long-term used low Z-oriented plasma material, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/02C23C16/44C23C16/16
Inventor 刘维良张小锋
Owner JINGDEZHEN CERAMIC UNIV
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