Thin film solar cell with improved photoelectric conversion efficiency and manufacturing method thereof

The technology of a solar cell and a manufacturing method, applied in the field of solar cells, can solve the problems of low photoelectric conversion efficiency and high production cost of solar cells, and achieve the effects of improved photoelectric conversion efficiency, low cost, and simple manufacturing method

Inactive Publication Date: 2011-09-14
FUDAN UNIV
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Problems solved by technology

[0004] Silicon thin-film solar cells mainly face two major problems in the production: one is that the phot

Method used

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  • Thin film solar cell with improved photoelectric conversion efficiency and manufacturing method thereof
  • Thin film solar cell with improved photoelectric conversion efficiency and manufacturing method thereof
  • Thin film solar cell with improved photoelectric conversion efficiency and manufacturing method thereof

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Embodiment Construction

[0021] The present invention is further described below by specific processing steps:

[0022] 1. Use a polysilicon film sample with a thickness of about 1um, which has been doped to form a p-n junction and deposited metal aluminum as the back electrode. After the standard RCA cleaning process, use a 2% HF dilution solution to remove the intrinsic oxide layer on the surface of the silicon wafer, such as figure 1 shown.

[0023] 2. Apply physical vapor deposition technology to deposit 20nm thick indium tin oxide (ITO: Indium Tin Oxides) on a large area of ​​silicon film as a surface transparent electrode, such as figure 2 shown.

[0024] 3. Apply physical vapor deposition technology to deposit 100nm thick aluminum film on the surface of ITO, such as image 3 shown.

[0025] 4. Spin-coat photoresist on the aluminum film, use positive resist for photoresist, such as Figure 4 shown.

[0026] 5. Use positive photoresist exposure and development to form a cylindrical array p...

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Abstract

The invention belongs to the technical field of solar cells, and particularly relates to a thin film solar cell with improved photoelectric conversion efficiency and a manufacturing method thereof. The thin film solar cell is manufactured by adding a periodic nanometer-sized metallic aluminum cylinder to a surface electrode of the conventional thin film solar cell, and introducing the localized surface plasmon resonance effect, so that the absorption efficiency is greatly improved; therefore, the photoelectric conversion efficiency of the solar cell is improved. Compared with the conventional silicon thin film solar cell, the silicon thin film solar cell into which the nanometer-sized aluminum cylinder is added has the advantage of high conversion efficiency, and the technology can be implemented by only adding one photoetching process. Compared with the precious metal silver commonly used for plasmon enhancement, the metallic aluminum has the advantages that the production cost can be greatly lowered while the same (slightly higher) absorption enhancement effect is achieved by using the metallic aluminum.

Description

technical field [0001] The invention belongs to the technical field of solar cells, and in particular relates to a thin-film solar cell and a manufacturing method thereof. technical background [0002] With the frequent shortage of traditional fuel resources such as coal and oil, the energy problem has increasingly become a bottleneck restricting the development of the international society and economy. Inexhaustible and inexhaustible solar energy, as the most important renewable energy source, has received extensive attention. More and more countries have begun to implement the "Sunshine Plan" to develop solar energy resources and seek new impetus for economic development. [0003] A solar cell is a device that converts sunlight energy directly into electrical energy due to the photovoltaic effect. It is a semiconductor photodiode. When the sun shines on the photodiode, the photodiode will convert the sun's light energy into electrical energy, generating current. Solar c...

Claims

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Application Information

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IPC IPC(8): H01L31/0224H01L31/04H01L31/18
CPCY02E10/50Y02P70/50
Inventor 梁萌蒋玉龙茹国平屈新萍李炳宗张卫
Owner FUDAN UNIV
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