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Silicon nanocolumn solar cell capable of improving photoelectric conversion efficiency and manufacturing method thereof

A technology for photoelectric conversion efficiency and solar cells, applied in the field of solar cells, can solve the problems of low photoelectric conversion efficiency and high production costs of solar cells, and achieve the effects of reducing production costs, improving absorption and enhancing effects

Inactive Publication Date: 2011-09-14
FUDAN UNIV
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Problems solved by technology

[0004] Silicon thin-film solar cells mainly face two major problems in the production: one is that the photoelectric conversion efficiency of solar cells is too low; the other is that its production cost is too high

Method used

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  • Silicon nanocolumn solar cell capable of improving photoelectric conversion efficiency and manufacturing method thereof
  • Silicon nanocolumn solar cell capable of improving photoelectric conversion efficiency and manufacturing method thereof
  • Silicon nanocolumn solar cell capable of improving photoelectric conversion efficiency and manufacturing method thereof

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Embodiment Construction

[0023] The present invention is further described below by specific processing steps:

[0024] 1. Use a polysilicon film sample with a thickness of about 2um, which has been doped to form a p-n junction and deposited metal aluminum as the back electrode. After the standard RCA cleaning process, use a 2% HF dilution solution to remove the intrinsic oxide layer on the surface of the silicon wafer, such as figure 1 shown.

[0025] 2. Spin-coat photoresist on the surface of the silicon film, and use positive resist for photoresist, such as figure 2 shown.

[0026] 3. Use positive photoresist exposure and development to form a cylindrical periodic array pattern with a period of 500nm and a radius of 125nm on the silicon surface, such as image 3 shown.

[0027] 4. Etch silicon with a reactive ion etching process to a depth of about 1um, such as Figure 4 shown.

[0028] 5. Use acetone to remove the remaining photoresist to form a periodic silicon nanocolumn array with a heig...

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Abstract

The invention belongs to the technical field of solar cells, in particular to a silicon nanocolumn solar cell capable of improving photoelectric conversion efficiency and a manufacturing method thereof. Nano-size metal aluminum cylindrical particles are added onto the end surface of a silicon nanocolumn solar cell substrate; and the absorption rate of the solar cell is improved by introducing local area surface plasmon resonance effect, so that the photoelectric conversion efficiency of the silicon nanocolumn solar cell is improved. Due to the use of metallic aluminum, compared with those of normally used noble metals (such as gold, silver and the like), the production cost can be greatly reduced and better absorption enhancement effect is achieved at the same time.

Description

technical field [0001] The invention belongs to the technical field of solar cells, and in particular relates to a silicon nanocolumn solar cell and a manufacturing method thereof. Background technique [0002] With the frequent shortage of traditional fuel resources such as coal and oil, the energy problem has increasingly become a bottleneck restricting the development of the international society and economy. Inexhaustible and inexhaustible solar energy, as the most important renewable energy source, has received extensive attention. More and more countries have begun to implement the "Sunshine Plan" to develop solar energy resources and seek new impetus for economic development. [0003] A solar cell is a device that converts sunlight energy directly into electrical energy due to the photovoltaic effect. It is a semiconductor photodiode. When the sun shines on the photodiode, the photodiode will convert the sun's light energy into electrical energy, generating current....

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18H01L31/20B82Y40/00H01L31/0352
CPCY02P70/50
Inventor 梁萌蒋玉龙茹国平屈新萍李炳宗张卫
Owner FUDAN UNIV
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