MEMS capacitive relative humidity sensor
A technology of microelectronic machinery and system capacitance, which is applied in piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, material capacitance, etc. Slow sensor response speed, speed up sensor response speed and other issues, to achieve the effects of reduced parasitic effects, low cost, and good long-term stability
Inactive Publication Date: 2011-11-30
SOUTHEAST UNIV
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Problems solved by technology
In 2004, Chinese Gu Lei proposed a relative humidity sensor made using CMOS technology. The sensitive unit of the humidity sensor is an interdigital capacitor structure, and the grid-shaped polysilicon heating resistor is placed under the comb-shaped electrode. As a humidity sensitive medium, imine has high sensitivity and good linearity, but the hysteresis characteristic of the sensor is not very good, and the response is slow. The heating circuit can increase the temperature of the humidity sensitive unit, thereby speeding up the response speed of the sensor, but this is inevitable will increase the power consumption of the sensor
In 2006, Chinese Peng Shaohua proposed a humidity sensor compatible with CMOS technology. The humidity sensor uses polyimide as the humidity sensitive medium, integrates the detection circuit and the humidity sensitive capacitor monolithically, and directly converts the change of the humidity sensitive capacitor It is a voltage change output, which is convenient for the back-end detection system to perform signal sampling and processing, but the response speed of the humidity sensor with this structure is slow
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[0009] The present invention will be further described below in conjunction with the accompanying drawings.
[0010] The invention is a MEMS capacitive relative humidity sensor, which is composed of a substrate, an oxide layer, and a capacitor electrode. The oxide layer is arranged on the substrate, the capacitor electrode is arranged on the oxide layer, and the capacitor electrode is drawn out from a pressure welding block to corrode the substrate. And the oxide layer above it forms a cavity, so that the upper and lower sides of the capacitor electrodes and between the capacitor electrodes are all air. The capacitor electrodes are comb-shaped electrodes and are arranged in a staggered manner. The free ends of the shape electrodes are all fixed on the oxide layer to ensure the mechanical strength of the capacitor electrodes.
[0011] see figure 1 -2. The present invention is a MEMS capacitive relative humidity sensor, which consists of a substrate 1, an oxide layer 2, a firs...
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The invention discloses a microelectromechanical system capacitive relative humidity sensor, which is characterized in that the humidity sensor comprises a substrate (1) provided with a cavity (5), an oxide layer (2) provided on the substrate (1) ), the first capacitor electrode (3) and the second capacitor electrode (4) respectively arranged on the oxide layer (2), the first capacitor electrode (3) and the second capacitor electrode (4) are arranged in the cavity (5) Above, the first capacitor electrode (3) includes several parallel first electrodes (33), the first common terminal (31) connecting the first electrodes (33) together, each first electrode (33) is provided with The first free end (32) opposite to the first common end (31), and the first electrode (33) are connected to the first common end (31) and the first free end (32). The invention has the advantages of low cost, high precision, strong anti-interference and good long-term stability.
Description
technical field [0001] The invention relates to a MEMS (microelectromechanical system) capacitive relative humidity sensor based on a standard CMOS (complementary metal oxide semiconductor) process, in particular to a MEMS relative humidity sensor using air as a humidity sensitive medium. Background technique [0002] Humidity measurement has important applications in industrial and agricultural production, national defense aviation, weather forecast, medical and health care, food processing, environmental protection and other fields. As an important part of the humidity measurement system, the humidity sensor has been developed for many years. From the original traditional humidity sensors such as wet and dry bulb hygrometers and hair hygrometers to the miniature humidity sensors that can be manufactured by standard CMOS technology. The humidity sensor processed by the standard CMOS process has the advantages of low power consumption, small size, low price, and good produc...
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Inventor 赵成龙黄庆安秦明
Owner SOUTHEAST UNIV