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Templet assembling technique of carbon-base nanotube coaxial heterojunction

A coaxial heterojunction, carbon-based nanotechnology, applied in the fields of carbon nanotubes, nanocarbons, nanotechnology, etc., can solve the problems of semiconductor characteristics characterization transistor assembly difficulties and other issues

Inactive Publication Date: 2014-05-14
SHENYANG JIANZHU UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the obtained nanostructures are layered and coaxially nested, which poses obvious difficulties for subsequent semiconductor characterization and transistor assembly.

Method used

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  • Templet assembling technique of carbon-base nanotube coaxial heterojunction
  • Templet assembling technique of carbon-base nanotube coaxial heterojunction
  • Templet assembling technique of carbon-base nanotube coaxial heterojunction

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] The technical route of the preparation process is as follows: figure 1 .

[0040] The product is a coaxial heterojunction of carbon-based nanotubes, which is formed by coaxial and seamless jointing of N-doped carbon-based nanotube segments and pure carbon nanotubes.

[0041] The controlled synthesis of the above carbon-based nanotube coaxial heterojunction uses anodized aluminum as a template, combined with chemical vapor deposition and plasma treatment. The main process steps are summarized as follows:

[0042] ①AAO template preparation: the channels are U-shaped, parallel to each other, and arranged in a directional manner. The openings are roughly located on the same plane, with an average diameter of 25nm and a depth of 5μm;

[0043] ② Preparation of N-doped carbon-based nanotubes: AAO templates were placed in an atmosphere protection furnace, and methyl nitrile (CH 3 CN) is the carbon source, high-purity nitrogen (volume purity ≥ 99.9996%, flow rate 500cm 3 / min...

Embodiment 2

[0049] The technical route of the preparation process is as follows: figure 1 .

[0050] The product is a coaxial heterojunction of carbon-based nanotubes, which is formed by coaxial and seamless jointing of pure carbon nanotube segments and N-doped carbon-based nanotube segments.

[0051] The controlled synthesis of the above carbon-based nanotube coaxial heterojunction uses anodized aluminum as a template, combined with chemical vapor deposition and plasma treatment. The main process steps are summarized as follows:

[0052] ① AAO template preparation: the channels are U-shaped, parallel to each other, arranged in a direction, and the openings are roughly located on the same plane, with an average diameter of 35nm and a depth of 1mm;

[0053] ②Preparation of pure carbon nanotubes: the AAO template is placed in an atmosphere protection furnace, and the reaction gas is acetylene (C 2 h 2 ) and high-purity nitrogen (N 2 ), a mixture of acetylene (C 2 h 2 ) and nitrogen (N...

Embodiment 3

[0060] The technical route of the preparation process is as follows: figure 2 .

[0061] The product is a coaxial heterojunction of carbon-based nanotubes, which is formed by coaxial and seamless jointing of pure carbon nanotube segments, N-doped carbon-based nanotubes and B-doped carbon-based nanotube segments.

[0062] The controlled synthesis of the above carbon-based nanotube coaxial heterojunction uses anodized aluminum as a template, combined with chemical vapor deposition and plasma treatment. The main process steps are summarized as follows:

[0063] ① AAO template preparation: the channels are hollow cylindrical, with openings at both ends, parallel to each other, and directional arrangement, the openings are roughly located on the same plane, with an average pore diameter of 20nm and a depth of 200nm;

[0064] ②Preparation of pure carbon nanotubes: the AAO template is placed in an atmosphere protection furnace, and the reaction gas is propylene (C 3 h 6 ) and hig...

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Abstract

The invention relates to the field of one-dimension nano materials, and particularly provides a carbon-base nanotube coaxial heterojunction and an assembling technique thereof by a templet method. The heterojunction is formed by coaxially butting pure carbon nanotubes, N-doped carbon nanotubes or B-doped carbon nanotubes with the same outer diameter in the longitudinal direction; the carbon-base nanotube fragments have the same outer diameter and different chemical components; and the outer diameter, length and wall thickness of the heterojunction are adjusted according to needs. By using the anodic aluminum oxide pore canals used as a templet, a chemical vapor deposition process and a plasma etching technique are combined to implement successive growth and connection of nanotubes on one templet, thereby obtaining the coaxial heterojunction. The chemical vapor deposition process adopts different reaction sources to grow the carbon-base nanotubes with required components, and the plasma etching can cut off part of the nanotube to form a nanotube fragment. The invention implements controlled synthesis of carbon-base nanotube heterojunctions with different forms, components and dimensions; the product has good repetitiveness; and the technique has strong controllability and satisfies the demand for the development of micro-electronic industry.

Description

Technical field: [0001] The invention relates to the field of one-dimensional nanometer materials, and in particular provides a coaxial heterojunction of carbon-based nanotubes and a template method assembly process thereof. Background technique: [0002] The essence of electronic integration technology is to assemble more electronic components in a certain space, especially crystal diodes, etc., while traditional silicon transistors are increasingly difficult to meet the requirements of the future development of microelectronics technology in terms of size and performance Therefore, it is urgent to find new semiconductor materials to replace the key position of silicon semiconductors in transistor assembly technology. Among them, the one-dimensional nanomaterials represented by carbon nanotubes (CNTs) are undoubtedly the ones with the most research value and development potential. . [0003] Heterojunction refers to the interface region formed by the contact of two differe...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B31/02B82Y40/00C01B32/158C01B32/16
Inventor 佟钰高见曾尤赵金波李晓
Owner SHENYANG JIANZHU UNIVERSITY