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V-Al-N hard coating with nano composite structure and preparation method thereof

A nano-composite, hard coating technology, applied in coating, metal material coating process, ion implantation plating and other directions, can solve the problems of poor coating lubricity, low friction coefficient, low coating hardness, etc. The effect of good quality, low friction coefficient and good economic benefits

Active Publication Date: 2012-07-04
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] Above-mentioned VN coating, VcCN coating and (Al 1-y x y )N coating, when the V content in the coating is low, the lubricity of the coating is poor; when the V content in the coating reaches more than 0.2, although the lubricity of the coating is improved, the coating The hardness is relatively low, and it is impossible to have both high hardness and low friction coefficient. This is because the formed coating is a single-phase solid solution structure, or it is a combination of vanadium nitride and hexagonal aluminum nitride (h-AlN ), these composite structures are difficult to make the coating have high hardness when the content of vanadium is high

Method used

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  • V-Al-N hard coating with nano composite structure and preparation method thereof
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  • V-Al-N hard coating with nano composite structure and preparation method thereof

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preparation example Construction

[0038] The preparation method of the V-Al-N hard coating of described nanocomposite structure, comprises the following steps:

[0039] (1) Substrate 2 cleaning:

[0040] First put the substrate 2 into the detergent of model HT1401 produced by Borer Company and ultrasonically clean it at a temperature of 60-70°C for 3-10 minutes, and then put it into the detergent of model HT1233 produced by Borer Company at 50-60°C. Ultrasonic cleaning at ℃ for 3-10 minutes, then ultrasonic cleaning in deionized water at 45-55℃ for 0.5-3 minutes, and finally put the cleaned substrate in a vacuum drying oven at 95-105℃ and bake for 3-10 minutes. Minutes, dried and placed on the rotatable substrate frame in the vacuum chamber;

[0041] Alternatively, first put the substrate 2 into acetone and ultrasonically clean it at a temperature of 60-70°C for 3-10 minutes, then put it into ethanol and ultrasonically clean it at a temperature of 50-60°C for 3-10 minutes, and then clean it at a temperature o...

Embodiment 1

[0049] (1) Substrate cleaning: first put the substrate into the detergent (pH value 12.2) of the model HT1401 produced by Borer Company, and ultrasonically clean it for 5 minutes at a temperature of 65 ° C, and then put it into the detergent produced by Borer Company HT1233 Ultrasonic cleaning at 55°C for 5 minutes in detergent (pH value 9.2), then ultrasonic cleaning in 50°C deionized water for 1 minute, and finally the cleaned substrate was baked in a vacuum oven at 105°C 5 minutes, dry and place on a rotatable substrate rack in a vacuum chamber.

[0050] (2) Deposition coating: in the vacuum chamber, the background pressure of the vacuum chamber is (4.5±0.5)×10 -5 Pa, the Al target is installed on the intermediate frequency cathode, the V target is installed on the DC cathode, the distance between the Al target and the V target and the substrate is 9.2cm, the Al target and the V target are separated from the substrate through the baffle, and the Ar gas is first introduced ...

Embodiment 2

[0053] (1) Substrate cleaning: first put the substrate into the detergent (pH value 12.2) of the model HT1401 produced by Borer Company, and ultrasonically clean it for 5 minutes at a temperature of 65 ° C, and then put it into the detergent produced by Borer Company HT1233 Ultrasonic cleaning at 55°C for 5 minutes in detergent (pH value 9.2), then ultrasonic cleaning in 50°C deionized water for 1 minute, and finally the cleaned substrate was baked in a vacuum oven at 105°C 5 minutes, dry and place on a rotatable substrate rack in a vacuum chamber.

[0054] (2) Deposition coating: in the vacuum chamber, the background pressure of the vacuum chamber is (4.5±0.5)×10 -5 Pa, the Al target is installed on the intermediate frequency cathode, the V target is installed on the DC cathode, the distance between the Al target and the V target and the substrate is 9.2cm, the Al target and the V target are separated from the substrate through the baffle, and the Ar gas is first introduced ...

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Abstract

The invention discloses a V-Al-N hard coating with a nano composite structure. The V-Al-N hard coating comprises the following component: (V1-xAlx) N, wherein 1-x is between 0.41 and 0.6, and x is between 0.4 and 0.59. The V-Al-N hard coating ensures lower friction coefficients and higher hardness and is particularly suitable for being used as cutter coatings. The invention also discloses a preparation method for the V-Al-N hard coating with the nano composite structure. The preparation method comprises the following steps of: cleaning a matrix; and depositing the coating: assembling an Al target on an intermediate-frequency cathode in a vacuum chamber, assembling a V target on a direct current (DC) cathode, inputting Ar gas and N2 gas, and sputtering the matrix to deposit the V-Al-N hard coating with the nano composite structure under the conditions of 250 DEG C to 500 DEG C and 0.3 Pa to 1.0 Pa by regulating the power of the Al target and the power of the V target. The V-Al-N hard coating and the preparation method thereof have the advantages of high maneuverability, high controllability, easy industrialized production and higher economic benefit.

Description

technical field [0001] The invention relates to a hard coating and the field of preparation thereof, in particular to a V-Al-N hard coating with a nanocomposite structure and a preparation method thereof. Background technique [0002] Using vapor deposition technology, hard coating is applied to the surface of the tool. The tool, such as cemented carbide, high-speed tool steel, ceramics, etc., has been proven to significantly increase the life of the tool and effectively improve the cutting quality of the workpiece. , The hard coating is especially suitable for application to alloy tools to improve the life of alloy tools and improve the cutting quality of workpieces. The most typical representatives of these hard coatings are titanium-based binary and multi-component nitrides, such as titanium nitride (TiN), titanium carbonitride (TiCN), titanium aluminum nitrogen (TiAlN), titanium silicon nitrogen (TiSiN), titanium Aluminum carbon nitrogen (TiAlCN), titanium aluminum sili...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/34
Inventor 黄峰葛芳芳李艳玲朱萍
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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