Method for transferring graphene film to substrate
A graphene film and transfer method technology, which is applied in the manufacturing of electrical components, circuits, semiconductor/solid-state devices, etc., can solve problems such as unfavorable graphene electronic device preparation, graphene film damage, etc., and achieve complete transfer, easy to achieve, and mechanical properties. Reduced, easy-to-operate effects
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Example Embodiment
[0048] Example 1: Transfer the graphene film on the metal nickel substrate to the surface of the silicon dioxide / silicon substrate material.
[0049] figure 2 It is a schematic structural diagram of the substrate transfer process of the graphene film in Example 1 of the present invention. Such as figure 2 As shown, first, a photoresist 9912 is spin-coated on the surface of a graphene film 102 prepared by CVD using nickel 101 as a catalyst, such as image 3 Shown is an optical photo of a graphene film attached to a nickel substrate. The spin-coating condition is 4000 rpm, 1 minute, and the film is cured at 115°C for 2 minutes; then a layer of heat release tape is attached to the surface of the gel 103 104. The heat release tape is required to completely cover the surface of the organic colloid; then soak it in a 0.5mol / L ferric chloride aqueous solution 105. In the solution, use tweezers to grip the corner of the tape and gently tear it. The tape will connect the colloid, The gr...
Example Embodiment
[0050] Example 2: The graphene film on metallic nickel is transferred to a plastic substrate.
[0051] The specific steps are similar to those in Embodiment 1, but the target substrate used is a plastic substrate, and the graphene film can also be successfully transferred to the plastic substrate.
Example Embodiment
[0052] Example 3: Transfer of graphene film on metallic copper to silicon dioxide / silicon substrate.
[0053] The specific steps are similar to those in Example 1, but the metal catalyst layer for CVD growth of graphene is copper, and the etching solution is ferric nitrate solution, and the graphene film can also be successfully transferred to the silicon dioxide / silicon substrate.
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