Femtosecond laser film micro-nanomachining real-time monitoring device

A technology of micro-nano processing and femtosecond laser, which is applied in the field of micro-processing devices of spectroscopic technology, can solve problems that affect the efficiency and continuity of processing, and cannot meet the needs of precision and miniaturization, so as to improve detection efficiency and reliability. Sexuality, saving processing efficiency, and wide application range

Inactive Publication Date: 2012-08-15
HUAIHAI INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But there is a problem at such a high pulse energy, because ultrafast laser microfabrication is not sensitive to the material being processed, how to prevent the melting of the matrix material when processing microdevices on thin films
With the improvement of the requirements for the precision and mini

Method used

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  • Femtosecond laser film micro-nanomachining real-time monitoring device

Examples

Experimental program
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Example Embodiment

[0018] Example 1, reference figure 1 , A femtosecond laser thin film micro-nano processing device, which includes a laser generating system, an external optical path system, a PC 15 and a three-dimensional mobile platform 11; the laser generating system consists of a pump source 1, a femtosecond laser 2, and The regenerative amplifier 3 is composed; the external optical path system is composed of a total mirror 4, a shutter 5, an attenuation mirror 7, a half mirror 8 and a focusing mirror 9; the laser light emitted by the laser generation system is focused on the external optical path system Focusing mirror 9; It is characterized in that: the device is also provided with a spectral focusing mirror 10, an optical fiber probe 12, a spectrometer 13, an enhanced CCD 14 and a time delay controller 16; the spectral focusing mirror 10 and the optical fiber probe 12 are fixed in three dimensions On the mobile platform 11, the spectrometer 13 is connected to the optical fiber probe 12 th...

Example Embodiment

[0019] In the second embodiment, the femtosecond laser thin film micro-nano processing device described in the first embodiment: an energy meter 6 is provided on the reflection direction side of the half mirror 8.

Example Embodiment

[0020] In Example 3, in the femtosecond laser thin-film micro-nano processing device described in Example 1 or 2, the response band of the spectrometer is 200 nm to 980 nm, and the resolution is 0.1 nm.

[0021] Using the femtosecond laser thin film micro-nano processing device of this embodiment, an experiment of processing thin film samples was performed. Before processing monitoring, first open the shutter 5, adjust the attenuation mirror 7, detect the pulse energy through the energy meter 6, and manually adjust the position of the focusing mirror 9 to focus the beam on the sample surface placed on the three-dimensional moving platform 11. Adjust the distance and angle between the spectral focusing mirror 10 and the optical fiber probe 12 and the sample. When the spectrometer 13, enhanced CCD 14, time delay controller (DG535) 16 and PC 15 can obtain the strongest plasma line, Fix the spectral focusing mirror 10 and the optical fiber probe 12 on the surface of the three-dimensi...

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Abstract

The invention relates to a femtosecond laser film micro-nanomachining real-time monitoring device. The device comprises a laser generating system, an external light path system, a PC (poly carbonate) machine and a three-dimensional mobile platform, wherein laser sent by the laser generating system is focused on a focusing mirror through the external light path system; the device is also provided with a spectrum focusing mirror, a fiber optic probe, a spectrometer, an enlargement mode CCD (charge coupled device) and a time delay controller, wherein the spectrum focusing mirror and the fiber optic probe are fixed on the three-dimensional mobile platform; the spectrometer is connected with the fiber optic probe through data lines, and the spectrometer is also connected with the time delay controller through the data lines; and the time delay controller is connected with a femtosecond laser through a signal wire, and the femtosecond laser, the enlargement mode CCD, an optical gate and the three-dimensional mobile platform are connected with the PC machine through the signal lines. The device provided by the invention has the advantages that the equipment is simple, the operation is easy and simple, the applicability is wide, the film micromachining rapid detection is realized, the accuracy for detecting element is very high, the device almost can detect any element, and the detection efficiency and the reliability are greatly improved.

Description

technical field [0001] The invention belongs to a micro-processing device of spectrum technology, in particular to a real-time monitoring device for femtosecond laser film micro-nano processing. Background technique [0002] Laser-induced breakdown spectroscopy is an important tool in elemental identification and quantitative analysis. It is optional, less destructive, high resolution and can perform real-time analysis of solid, liquid, gaseous and aerosol materials, making the technology more and more widely used. [0003] In 1962, Fred Brech first proposed the spectrochemical method of plasma induced by ruby ​​maser; in 1964, Runge and in 1965, Rasberry established a reference curve for quantitative analysis of element content. In 1967, Kenneth used a ruby ​​laser to excite plasma on the ore to detect the content of trace elements in the ore by comparing the reference curve, and the detection limit reached 1000ppm. After more than 40 years of development, LIBS has gone t...

Claims

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Application Information

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IPC IPC(8): G01N21/63
Inventor 袁冬青周明徐建婷王辉
Owner HUAIHAI INST OF TECH
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