Femtosecond laser film micro-nanomachining real-time monitoring device

Abstract

The invention relates to a femtosecond laser film micro-nanomachining real-time monitoring device. The device comprises a laser generating system, an external light path system, a PC (poly carbonate) machine and a three-dimensional mobile platform, wherein laser sent by the laser generating system is focused on a focusing mirror through the external light path system; the device is also provided with a spectrum focusing mirror, a fiber optic probe, a spectrometer, an enlargement mode CCD (charge coupled device) and a time delay controller, wherein the spectrum focusing mirror and the fiber optic probe are fixed on the three-dimensional mobile platform; the spectrometer is connected with the fiber optic probe through data lines, and the spectrometer is also connected with the time delay controller through the data lines; and the time delay controller is connected with a femtosecond laser through a signal wire, and the femtosecond laser, the enlargement mode CCD, an optical gate and the three-dimensional mobile platform are connected with the PC machine through the signal lines. The device provided by the invention has the advantages that the equipment is simple, the operation is easy and simple, the applicability is wide, the film micromachining rapid detection is realized, the accuracy for detecting element is very high, the device almost can detect any element, and the detection efficiency and the reliability are greatly improved.

Description

technical field [0001] The invention belongs to a micro-processing device of spectrum technology, in particular to a real-time monitoring device for femtosecond laser film micro-nano processing. Background technique [0002] Laser-induced breakdown spectroscopy is an important tool in elemental identification and quantitative analysis. It is optional, less destructive, high resolution and can perform real-time analysis of solid, liquid, gaseous and aerosol materials, making the technology more and more widely used. [0003] In 1962, Fred Brech first proposed the spectrochemical method of plasma induced by ruby ​​maser; in 1964, Runge and in 1965, Rasberry established a reference curve for quantitative analysis of element content. In 1967, Kenneth used a ruby ​​laser to excite plasma on the ore to detect the content of trace elements in the ore by comparing the reference curve, and the detection limit reached 1000ppm. After more than 40 years of development, LIBS has gone t...

AI Technical Summary

Problems solved by technology

But there is a problem at such a high pulse energy, because ultrafast laser microfabrication is not sensitive to the material being processed, how to prevent the melting of the matrix material when processing microdevices on thin films

With the improvement of the requirements for the precision and miniaturization of devices, the laser processing devices of the prior art can no longer meet the new needs of precision and miniaturization

Moreover, the traditional processing is through manual operation and manual observation after processing, which will affect the efficiency and continuity of processing

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