Method for preparing comb-like nanostructure zinc oxide gas sensitive sensor

Abstract

The invention belongs to the technical field of one-dimensional nanostructure semiconductor oxide gas sensitive sensor preparation and relates to a method for preparing a comb-like nanostructure zinc oxide gas sensitive sensor capable of detecting carbon monoxide under the condition of room temperature by utilizing a chemical vapor deposition method. The method for preparing the comb-like nanostructure zinc oxide gas sensitive sensor comprises the following steps of: firstly, selecting the growth condition of a crystal as needed; preparing comb-like nanostructure zinc oxide by utilizing the improved chemical vapor deposition method; then, dispersing the comb-like nanostructure zinc oxide to a gold cell array; connecting two adjacent cells in which the zinc oxide exists by using microelectrodes; and packaging in a shell by adopting a conventional semiconductor packaging process to prepare the zinc oxide gas sensitive sensor. The sensor works at normal temperature and is simple in structure, is low in power consumption, simple in preparation process and low in cost. The growing zinc oxide crystal is high in purity and good in completeness; the surface area of a gas contact reaction is big; the contact resistance is low; actions of gathering and conducting current are performed by the zinc oxide at the combed parts; and the sensor is high in sensitivity.

Description

Technical field: [0001] The invention belongs to the technical field of preparing a one-dimensional nanostructure semiconductor oxide gas sensor, and relates to a method for preparing a comb-like nanostructure zinc oxide gas sensor capable of detecting carbon monoxide at room temperature by using a chemical vapor deposition method. Background technique: [0002] A gas sensor is a sensor device that detects a specific gas. For example, gas leakage and carbon monoxide poisoning occur frequently during the use of carbon monoxide. Usually, when an adult is exposed to an environment with a carbon monoxide content of 400ppm, the symptoms of poisoning within 2 hours are Forehead pain, 3 hours later will be life-threatening; so qualitative or quantitative detection, monitoring, and alarm detection of flammable gases and toxic gases are essential. The operating temperature of many oxide gas sensors currently used is usually 200-400°C, and heating elements need to be installed, result...

AI Technical Summary

Problems solved by technology

Compared with traditional ZnO materials, comb-like nanostructured ZnO gas-sensing materials prepared by chemical vapor deposition have larger specific surface area, larger surface activity and stronger adsorption capacity, which can accelerate the reaction with gas. The resulting gas sensor can improve the sensitivity and response speed of the gas sensor, and can work at room temperature without heating elements. And providing this technical solution will be the main task of the present invention

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