Process for manufacturing bionic gecko structure material

A structural material and manufacturing process technology, applied in the field of manufacturing process of imitation gecko foot structural materials, can solve the problems of complex process, poor hydrophobicity, high cost of hierarchical micro-nano structure, and achieve simple equipment requirements, simple operation and low cost. Effect

Inactive Publication Date: 2012-10-10
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The invention provides a manufacturing process of a gecko foot imitation structure material, which overcomes the current disadvantages of high cost, complex process, inability to process highly ordered nanostructures, poor hydrophobicity, and no self-cleaning ability for processing cross-scale hierarchical micro-nano structures.

Method used

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  • Process for manufacturing bionic gecko structure material
  • Process for manufacturing bionic gecko structure material
  • Process for manufacturing bionic gecko structure material

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0040] 1. Self-assembled polystyrene pellets

[0041] Self-assemble a single layer of closely arranged polystyrene spheres on a clean silicon wafer, and the diameter of the polystyrene spheres is 500nm.

[0042] 2. Plasma etching polystyrene beads

[0043] Using plasma etching equipment, with O 2 The polystyrene balls on the surface of the silicon wafer are etched to reduce their diameters, and the tightly arranged polystyrene balls become separate and orderly arranged polystyrene balls.

[0044] 3. Plating protective layer

[0045] The silicon wafer treated in step 2 is coated with a layer of chromium film as a protective layer.

[0046] 4. Remove polystyrene pellets

[0047] Put the silicon wafer coated with protective layer into toluene to completely remove the polystyrene pellets on the surface of the silicon wafer. Then use deionized water to wash, remove residual organic solvent, and dry.

[0048] 5. Plating catalyst layer

[0049] A layer of silver film is coated...

example 2

[0057] The operation steps are the same as Example 1, and the parameters are as follows:

[0058]

[0059] In the example of the present invention, various organic solvents capable of dissolving polystyrene can be used in the fourth step to remove polystyrene pellets, such as toluene and dichlorotoluene.

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Abstract

The invention belongs to a process for manufacturing a micro-nano bionic structure, and particularly relates to a process for manufacturing a bionic gecko foot structure material. The process comprises steps of (1) self-assembling polystyrene spheres with a diameter from 100 nanometers to 1 micrometer; (2) performing plasma etching on the polystyrene spheres; (3) plating a protective layer; (4) removing the polystyrene spheres; (5) plating a catalyst layer; (6) performing wet etching; (7) performing spin coating of photoresist and performing photoetching development; and (8) casting a mould and demoulding, pouring polydimethylsiloxane (PDMS) on a compound die, baking, and peeling off the PDMS from the compound die to obtain the nano-micro layered bionic gecko foot structure material. The process can be used for manufacturing a bionic gecko foot layered structure which has quite high absorbability, can be easily separated from an absorbed surface, and has super-hydrophobicity and self-cleaning ability.

Description

technical field [0001] The invention belongs to the manufacturing process of micro-nano bionic structure, specifically relates to the manufacturing process of high aspect ratio and cross-scale layered structure, which can be used to manufacture a layered structure imitating gecko feet, which has strong adsorption force and can be easily detached Adsorption surface, and has super hydrophobicity, self-cleaning ability. Background technique [0002] In recent years, bionic materials have been widely used in medicine, energy and other fields. Biological structures with cross-scale structures, such as the surface structure of the fly's compound eye, the surface structure of the lotus leaf, and the surface structure of the gecko's foot, have very superior properties. Therefore, it is of great significance to explore the manufacturing process of these cross-scale biomimetic structures. [0003] The surface of gecko feet in nature has a multi-level and cross-scale layered structur...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00
Inventor 廖广兰谭先华史铁林孙博盛文军汤自荣夏奇高阳
Owner HUAZHONG UNIV OF SCI & TECH
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