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Barium titanate chemico-mechanical polishing aqueous composition and its application

A water-based composition, chemical mechanical technology, applied in the polishing composition containing abrasives, surface polishing machine tools, grinding/polishing equipment, etc., can solve the problems that need to be improved, so as to improve the polishing removal rate and reduce chemical corrosion function, the effect of ensuring stability

Active Publication Date: 2012-11-21
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, the current barium titanate chemical mechanical polishing aqueous composition and barium titanate substrate chemical mechanical polishing process still need to be improved

Method used

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  • Barium titanate chemico-mechanical polishing aqueous composition and its application
  • Barium titanate chemico-mechanical polishing aqueous composition and its application
  • Barium titanate chemico-mechanical polishing aqueous composition and its application

Examples

Experimental program
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Effect test

Embodiment 1

[0036] Add 20 grams of citric acid and 1 gram of polyvinyl alcohol into 400 grams of deionized water successively, stir to dissolve, evenly stir slowly and add 480 grams of 25% 50nm aluminum oxide hydrosol, then calibrate its pH value to 10.5, finally add water to make up 1000 grams and stir evenly, then polish the polishing sample under 1.0Psi pressure. The results show that the polishing removal rate MRR is 204.0nm / min, and the surface roughness Sa is 4.98nm.

Embodiment 2

[0038] Add 20 grams of citric acid and 1 gram of polyvinyl alcohol into 400 grams of deionized water in sequence, stir to dissolve, and then slowly stir and add 400 grams of 30% 50nm silica hydrosol, and then use NaOH to calibrate its pH value to 10.5 , and finally add water to make up 1000 grams and stir evenly, and then polish the polished sample under a pressure of 1.0Psi. The results show that the polishing removal rate MRR is 120.6nm / min, and the surface roughness Sa is 2.37nm.

Embodiment 3

[0040] Add 20 grams of citric acid, 10 grams of ammonium fluoride and 1 gram of polyvinyl alcohol into 400 grams of deionized water in sequence, stir to dissolve, and then slowly stir and add 400 grams of 30% 50nm silica hydrosol, and then use NaOH Calibrate its pH value to 10.5, and finally add water to make up 1000 grams, stir evenly, and then polish the polishing sample under a pressure of 1.0 Psi. The results show that the polishing removal rate MRR is 152.3nm / min, and the surface roughness Sa is 2.18nm.

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Abstract

The invention relates to a barium titanate chemico-mechanical polishing aqueous composition and its application. Specifically, the barium titanate chemico-mechanical polishing aqueous composition comprises: 1-20 wt%, preferably 8-15 wt% of an abrasive; 0.5-10 wt%, preferably 1-3 wt% of a complexing agent; and 0.01-5 wt%, preferably 0.1-1 wt% of a surface adsorbent, wherein the barium titanate chemico-mechanical polishing aqueous composition has a pH value of 8.0-12.0, preferably 10.0-11.5. The barium titanate chemico-mechanical polishing aqueous composition provided in the invention can be effectively applied to a barium titanate substrate chemico-mechanical polishing process, thereby being able to effectively obtain a polished barium titanate layer with a high polishing rate and high surface quality.

Description

technical field [0001] The invention relates to barium titanate chemical mechanical polishing aqueous composition and application thereof. Specifically, the invention relates to a barium titanate chemical mechanical polishing aqueous composition and a barium titanate substrate chemical mechanical polishing process. Background technique [0002] Barium titanate (BaTiO 3 , abbreviated as BTO) is the earliest discovered ABO 3 Typical ferroelectrics with a perovskite crystal structure, divided into single crystal and polycrystalline structures, have high dielectric constant and excellent electrical properties such as ferroelectric, piezoelectric and positive temperature coefficient effects, and are widely used in functional ceramics at this stage Research fields such as domain microstructure analysis and research of ferroelectric materials, and ultra large scale integrated circuit (Ultra Large Scale Integration, ULSI) development and manufacturing fields such as IC process dev...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09G1/02B24B29/00
Inventor 路新春戴媛静潘国顺雒建斌
Owner TSINGHUA UNIV
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