Nano-optics multi-parameter measurement platform

Abstract

The invention relates to the technical field of reactor engineering and discloses a nanophotonics multi-parameter measurement platform. The nanophotonics multi-parameter measurement platform comprises a multi-parameter variable excitation system, a sample position direction fine-adjusting unit, a microscope observation alignment system, a scanning near-field optical microscope detection system and a computer; the sample position direction fine-adjusting unit is used for mounting a sample to be measured; the multi-parameter variable excitation system provides a lighting excitation light source signal to the sample to be measured; the microscope observation alignment system adjusts an imaging area of the sample to be measured, collects the image information of the sample to be measured, and transmits the image information to the computer to be displayed; the scanning near-field optical microscope detection system collects the optical near-field information of the sample to be measured and transmits the optical near-field information to the computer; and the computer processes the optical near-field information and then displays the processed optical near-field information. The nano-optics multi-parameter measurement platform is compact in structure, can achieve adjustment with multiple degrees of freedom, and can achieve optical excitation of variable excitation wavelength, continuous adjustment of the incident angle and controllable polarization state on a given excitation area of a nano photonics device.

Description

technical field [0001] The invention relates to the field of nano-optic technology, in particular to a multi-parameter measurement platform for nano-optical materials and nano-photonic devices based on a near-field optical microscope. Background technique [0002] The research of nanophotonics has rapidly become an international frontier and hot spot in recent years. Its goal is to manipulate and control photons at the nanoscale, realize the regulation of light waves and light fields, and develop smaller, faster, more efficient, Optical devices with stronger signals can realize integrated photonic circuits and provide a more powerful physical theoretical basis and production technology basis for the next generation of information technology. Nanophotonics devices use the optical near-field as a signal carrier, and realize various functions through the local electromagnetic interaction between nanoscale materials and structures and the optical near-field, and have advantages ...

AI Technical Summary

Problems solved by technology

However, the excitation optical path of the current commercial SNOM system generally has the problems of insufficient flexibility, adjustable parameters, especially the extremely limited incidence angle, and the equipped sample stages are often large in size, small in openness, and have few degrees of freedom in sample adjustment.

The singleness of excitation light path and sample adjustment greatly limits the optical excitation and optical property measurement of nanophotonics devices and materials

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