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Miniature composite structure laser

A composite structure and laser technology, applied in the field of micro-optical components, can solve problems such as unfavorable optical integration, general structural quality factor, complex processing technology, etc., and achieve the effect of simple preparation, high quality factor and low threshold

Inactive Publication Date: 2013-04-03
NANJING UNIV
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

At present, the micro-composite structure lasers that have been realized in the world mainly include: semiconductor nanowires and racetrack-type integrated waveguides, semiconductor nanowires and photonic crystal resonators to form composite structures, etc., but these structural quality factors are general and the processing technology is complicated. Facilitates optical integration

Method used

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Embodiment 1

[0024] The preparation process of the micro composite structure laser of the present invention is as follows:

[0025] (1), with the combination of photolithographic mask, dry etching and wet etching means, a whispering gallery type silicon oxide microdisk 1 is prepared on a silicon wafer growing a silicon oxide film, and the silicon oxide microdisk 1 is a resonant cavity, wherein , a slope 11 is provided on the side of the silicon oxide microdisk 1 . Silicon oxide microdisk 1 resonators with different diameters and thicknesses can be obtained by controlling the mask process and selecting different thicknesses of the silicon oxide film. The diameter of the silicon oxide microdisk 1 is 20-100 μm, and the thickness of the silicon oxide microdisk 1 is 0.2-2 μm. Wherein, the silicon oxide microdisk 1 is supported by silicon pillars 3 formed by etching;

[0026] (2), the semiconductor nanowire 2 is grown in a tubular high-temperature furnace by physical vapor deposition, and the ...

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Abstract

The invention discloses a miniature composite structure laser which comprises a silicon oxide micro-disk and semiconductor nanowires. An inclined surface is arranged on the side surface of the silicon oxide micro-disk, and the semiconductor nanowires are arranged on the inclined surface. The miniature composite structure laser has the advantages of being miniature, simple in production, stable, high in quality factor, low in threshold and the like.

Description

technical field [0001] The invention belongs to the field of micro-optical elements, and relates to a micro-composite structure laser. Background technique [0002] Laser is an important optoelectronic device, which has important applications in many fields such as industry, military, communication, medicine, and scientific research. The development of micro-nanophotonics in recent years has made miniaturized lasers have broad application prospects. With the improvement of the preparation process, semiconductor nanowires have been prepared and proved to be an excellent optoelectronic material, which has the advantages of single crystal, less defects, high gain coefficient, and wide range of materials. However, if the semiconductor nanowire itself is used as an F-P resonator, the quality factor of the resonator is not high due to low reflectivity and large diffraction loss. An attempt to realize microlasers based on semiconductor nanowires is to use semiconductor nanowires ...

Claims

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Application Information

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IPC IPC(8): H01S5/30
Inventor 姜校顺王冠中赵鸣霄肖敏
Owner NANJING UNIV
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