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Preparation method of patterned YBCO high-temperature superconducting thin film

A high-temperature superconducting thin film, yttrium barium copper oxide technology, which is applied in the preparation field of patterned yttrium barium copper oxide high temperature superconducting thin film, can solve the problems of lack of high performance, colloidal solution precipitation, etc., so as to avoid the decrease of the superconductivity of the thin film , the process cycle is short, the effect of improving the etching efficiency

Inactive Publication Date: 2013-05-01
江苏天诚智能集团有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In the inventor's previous patents, the process technology for preparing YBCO thin films by the low-fluorine photosensitive chemical solution method was proposed, but the solution used in this technology contains amide ions, which easily causes the colloidal solution to precipitate, and also makes the prepared YBCO film The film also has a large number of impurity phases, so it does not have the characteristics of high performance

Method used

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  • Preparation method of patterned YBCO high-temperature superconducting thin film
  • Preparation method of patterned YBCO high-temperature superconducting thin film
  • Preparation method of patterned YBCO high-temperature superconducting thin film

Examples

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Effect test

Embodiment 1

[0038] Dissolve yttrium acetate in trifluoroacetic acid containing a small amount of distilled water, so that yttrium acetate: trifluoroacetic acid: water = 1: (3~6): (6~18) (molar ratio), under the heating condition of 40~80°C After stirring and clarification, after drying at 80°C, a white solid was obtained. Then the white solid was dissolved in methanol, and an appropriate amount of benzoylacetone was added to make yttrium:benzoylacetone:methanol=1:0.8:10 (molar ratio). After stirring and clarification, solution A was obtained; Dissolve in the mixed solution of acrylic acid and methanol, so that barium acetate:acrylic acid:methanol=1:2:15 (molar ratio), after stirring and clarification, the solution B is obtained; Dissolve copper acetate in the mixed solution of acrylic acid and methanol, After stirring and clarifying, add benzoylacetone so that copper acetate:acrylic acid:benzoylacetone:methanol=1:2:0.8:20 (molar ratio), after stirring and clarifying, solution C is obtaine...

Embodiment 2

[0042] Dissolve yttrium acetate in trifluoroacetic acid containing a small amount of distilled water, so that the molar ratio of yttrium acetate, trifluoroacetic acid and water is 1: (3~6): (6~18), and stir under heating at 40~80°C After clarification, a white solid was obtained after drying at 80°C. Then the white solid was dissolved in methanol, and an appropriate amount of benzoylacetone was added so that the mol ratio of yttrium, benzoylacetone and methanol was 1:0.8:10. After stirring and clarification, solution A was obtained; dissolving barium acetate in In the mixed solution of acrylic acid and methanol, the molar ratio of barium acetate, propionic acid and methanol is 1:2:15. After stirring and clarification, solution B is obtained; dissolve copper acetate in the mixed solution of propionic acid and methanol, and stir After clarification, add benzoylacetone so that the mol ratio of copper acetate, propionic acid, benzoylacetone and methanol is 1:2:0.8:20, after stirri...

Embodiment 3

[0046] Dissolve yttrium acetate in trifluoroacetic acid containing a small amount of distilled water, so that the molar ratio of yttrium acetate, trifluoroacetic acid and water is 1: (3~6): (6~18), and stir under heating at 40~80°C After clarification, a white solid was obtained after drying at 80°C. Then the white solid was dissolved in methanol, and an appropriate amount of benzoylacetone was added so that the mol ratio of yttrium, benzoylacetone and methanol was 1:0.8:10. After stirring and clarification, solution A was obtained; dissolving barium acetate in In the mixed solution of acrylic acid and methanol, the molar ratio of barium acetate, acrylic acid and methanol is 1:2:15. After stirring and clarification, solution B is obtained; dissolve copper acetate in the mixed solution of propionic acid and methanol, and stir to clarify Finally, add benzoylacetone so that the molar ratio of copper acetate, acrylic acid, benzoylacetone, and methanol is 1:2:0.8:20. After stirring...

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Abstract

The invention discloses a preparation method of a patterned YBCO (yttrium barium copper oxide) high-temperature superconducting thin film which comprises the steps of: preparing a low-fluorine photosensitive solution with the following active ingredients: rare-earth acetate, barium acetate, copper acetate, trifluoroacetic acid, acrylic acid, benzoylacetone and methanol at a mole ratio of 1:2:(3-4):(3-6):(6-12):(3-4):(60-240), (2) coating, (3) conducting exposing and solution washing, (4), pretreating at a low temperature, and (5) conducting final treatment. According to the preparation method of the patterned YBCO high-temperature superconducting thin film, a chemical complexation technology is further adopted based on the improved low-fluorine solution free of amine ions, and the superconducting thin film is endowed with an optical property, and has a special patterned YBCO superconducting thin film graph through ultraviolet exposure, solvent washing and heat treatment. The technical route has the characteristics of low cost, short technical cycle, and good micrographic performance of the film.

Description

technical field [0001] The invention relates to the technical field of high-temperature superconducting films, in particular to a method for preparing a patterned yttrium-barium-copper-oxygen high-temperature superconducting film. Background technique [0002] High-temperature superconductivity is a superconducting material that can be applied in the liquid nitrogen temperature region. High-temperature superconducting thin films have a high critical transition temperature and low current loss, and can be used in weak current fields such as microelectronic devices to make various high-precision and sharp electronic devices, such as superconducting quantum interference devices (SQUID), Josephson junctions, superconducting coupled antennas, and superconducting filters, etc. Electronic devices used in the weak current field are mainly divided into two categories: active devices and passive devices. Active devices are mainly represented by Josephson devices and superconducting ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/45C04B35/624C04B35/64
Inventor 赵万富陈源清
Owner 江苏天诚智能集团有限公司
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