Chemical bath deposition system

Abstract

A chemical bath deposition system includes a chemical bath tank, a chemical-solution purification device, and a dosing device. The chemical bath tank is used for storing a buffer-layer solution. Cation is adapted to react with anion to form the buffer layer on the photoelectric transducing layer of a back electrode substrate when the back electrode substrate is placed in the chemical bath tank to be immersed in the buffer-layer solution. The chemical-solution purification device is communicated with the chemical bath tank for removing residual cation to obtain a purified solution after the cation reacts with the anion to form the buffer layer. The dosing device is for performing compensation of the cation according to a component ratio of the purified solution. A chemical purification device is employed to purify residual cation after buffer layer chemical solution forms a buffer layer after reaction, so that a chemical solution is recovered and reused. And, the quality of the buffer layer subsequently formed is ensured.

Description

technical field [0001] The invention relates to a chemical mixed bath deposition system, in particular to a chemical mixed bath deposition system which uses a chemical liquid purification device to purify the reacted buffer layer chemical solution. Background technique [0002] In the traditional solar cell manufacturing process, the common design used to form the buffer layer (such as cadmium sulfide, zinc sulfide, etc.) on the solar cell substrate uses the chemical bath deposition method (Chemical Bath Deposition, CBD), which will The solar cell substrate of the first layer is immersed in a chemical mixed bath tank with a chemical solution that can react to form a buffer layer. During the immersion, the buffer layer can pass cations (such as cadmium ions, zinc ions, etc.) and anions (such as sulfur ions) in the chemical solution. ions, etc.) and deposited on the photoelectric conversion layer. [0003] In addition, in order to further ensure the formation quality of the a...

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Problems solved by technology

However, since the reacted chemical solution will still be in a continuous reaction state, the above design cannot accurately analyze the final solution composition ratio of the reacted chemical solution. That is to say, even through the addition of solution components, the above design still cannot The reacted chemical solution is accurately reduced to the chemical solution before the reaction, which will affect the formation quality of the subsequent buffer layer

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