Size encapsulation structure and encapsulation technology of light-emitting diode (LED) wafer level chip
A technology of chip size packaging and packaging technology, which is applied in the direction of electrical components, circuits, semiconductor devices, etc., can solve the problems of poor product consistency, low packaging efficiency, and many thermal interfaces, so as to improve consistency, improve production efficiency, and improve heat dissipation effect of ability
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Embodiment 1
[0045] Embodiments of the present invention are further described below in conjunction with the accompanying drawings:
[0046] Fabrication of LED wafer bonding layer structure: photolithography and development on the LED epitaxial layer, transfer the designed electrode pattern to the LED epitaxial layer, etch GaN by dry etching process, the etching depth is n-type GaN7 and multi-layer The sum of the thicknesses of the quantum well 8, expose n-type GaN6, make an insulating layer between n-type GaN6 and p-type GaN7, metallize n-type GaN6 and p-type GaN7, and pad 4 includes Ni, Ag, Au, ITO and other metals . Photolithography, development, and fabrication of the bonding layer 5, the fabrication methods may include processes such as deposition, printing, and electroplating. The material of the bonding layer 5 may include: Sn-Ag, Sn, Ag, Au, Sn-Ag-Cu, Pb-Sn, Au-Sn and other metals. Such as Figure 8 shown. The shape of the bonding layer 5 can be two pieces of positive and negat...
Embodiment 2
[0052] Embodiment 2 is the same as Embodiment 1, except that the fluorescent layer on the sapphire is formed by a printing process, and its process steps are before all processes.
Embodiment 3
[0054] The third embodiment is the same as the first embodiment, except that the bonding process between the LED wafer and the silicon substrate is realized by a reflow process.
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Abstract
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