Preparation method of graphite nanometer hole
A nano-hole and graphene technology, applied in graphene, nano-carbon, chemical instruments and methods, etc., can solve the problems of solid-state nano-hole thickness, detection impact, etc., and achieve a suitable pore size, low manufacturing cost, and high mechanical strength. Effect
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[0029] The following examples illustrate the present invention, but these examples should not be construed as limiting the present invention.
[0030] Take the preparation of graphene nanoholes by using copper thin film as an example:
[0031] 1. Pretreatment of copper thin film
[0032] Metal copper film (50nm-1mm) is used as a catalyst for growing graphene by CVD method, and the surface of Cu film is treated with acetone, ethanol and dilute hydrochloric acid to remove impurities such as metal oxides and oil.
[0033] 2. Preparation of single-layer or multi-layer graphene on copper film
[0034] Graphene layers were prepared on copper thin films by chemical vapor deposition. The carbon source used was methane (CH 4 ), the other auxiliary gas in the reaction is hydrogen H 2 And argon Ar, in which hydrogen plays a reducing role and argon plays a protective role.
[0035] (1) Put the treated copper thin film into the CVD process tube furnace.
[0036] (2) into hydrogen and...
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