Preparation method of rear-earth polishing powder

A rare earth polishing powder, rare earth technology, applied in rare earth metal compounds, chemical instruments and methods, polishing compositions containing abrasives, etc. Complex process and other issues

Inactive Publication Date: 2013-09-11
上海华明高纳稀土新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Rare earth fluoride particles are relatively fine, and the post-treatment process is complicated; at the same time, the mixing process of fluoride and oxide is also relatively complicated; this method

Method used

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  • Preparation method of rear-earth polishing powder

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] In the rare earth carbonate, the mass ratio of each component is: the total amount of rare earth REO is 45%; the content of cerium oxide (CeO 2 / TREO) is 62%, and the lanthanum oxide content (La 2 o 3 / TREO) was 38%;

[0039] Mix the above 1000kg rare earth carbonate with 2000kg water, add 1kg sodium hydroxide, stir well, heat to 60°C, and age for 5h. Then add 90 kg of hydrofluoric acid with a weight concentration of 20%, continue to stir for 1 hour, and then centrifugally dehydrate to obtain rare earth fluorocarbonate;

[0040] The rare earth fluorocarbonate is calcined at 940°C for 5 hours to obtain a precursor of rare earth oxyfluoride polishing powder, which is then subjected to jet crushing and jet classification to obtain the rare earth polishing powder. The polishing powder is tested by laser particle size analyzer: D 50 =1.01 μm. figure 1 It is the XRD of the obtained mixed rare earth polishing powder.

Embodiment 2

[0042] In the rare earth carbonate, the mass ratio of each component is:

[0043] The total amount of rare earth REO is 45%; the content of cerium oxide (CeO 2 / TREO) is 66%, and the lanthanum oxide content (La 2 o 3 / TREO) was 34%;

[0044] Mix the above 1000kg rare earth carbonate with 2000kg water, add 1.5kg sodium hydroxide, stir well, heat to 80°C, and age for 4h. Then slowly add 95 kg of 20% hydrofluoric acid, continue to stir for 2 hours, and centrifugally dehydrate to obtain rare earth fluorocarbonate;

[0045] The rare earth fluorocarbonate is calcined at 900°C for 6 hours to obtain the precursor of the rare earth oxyfluoride polishing powder, and then the rare earth polishing powder is obtained by jet crushing and jet classification. The polishing powder is tested by laser particle size analyzer: D 50 =1.8μm.

Embodiment 3

[0047] In the rare earth carbonate, the mass ratio of each component is:

[0048] The total amount of rare earth REO is 45%; cerium oxide (CeO 2 / TREO) is 62%, and the lanthanum oxide content (La 2 o 3 / TREO) is 32%, and the content of praseodymium oxide (Pr6 o 11 / TREO) is 6%;

[0049] Mix the above 1000kg rare earth carbonate with 1500kg water, add 2kg sodium hydroxide, stir well, heat to 90°C, and age for 3h. Then slowly add 105 kg of 20% hydrofluoric acid, continue to stir for 3 hours, and then centrifugally dehydrate to obtain rare earth fluorocarbonate;

[0050] Calcining the rare earth fluorocarbonate at 850° C. for 7 hours to obtain the precursor of the rare earth oxyfluoride polishing powder, and then crushing by air flow and classifying by jet flow to obtain the rare earth polishing powder. The polishing powder is tested by laser particle size analyzer: D 50 =1.2μm.

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Abstract

The invention discloses a preparation method of rear-earth polishing powder. The preparation method comprises the following steps of: (1), mixing rare earth carbonate with water, and adding a mineralizer for ageing to obtain alkaline type rare earth carbonate slurry; (2), adding a hydrofluoric acid solution to the alkaline type rare earth carbonate slurry for stirring for 1 hour to 3 hours and dehydrating to obtain rear-earth carbonate; (3), roasting the rear-earth carbonate to obtain rear-earth oxyfluoride; and (4), crushing and classifying the rear-earth oxyfluoride to obtain rear-earth polishing powder. The preparation method of the rear-earth polishing powder disclosed by the invention can be used for obtaining polishing powder of a special crystal form, so that the dimension size and morphology uniformity of the polishing powder particles are ensured without generating free fluorine ions and fluoride that affect the polishing precision and the polishing speed, and therefore, the crystallization degree is high; moreover, the product polishing powder is good in wear resistance, quick in polishing speed and easily controllable in polishing precision. Besides, the product is good in uniformity, high in production efficiency, low in cost, free of pollution and suitable for surface polishing machining of electronic information industrial precise apparatuses including an integrated circuit, a panel display, optical glass and the like.

Description

technical field [0001] The invention relates to a preparation method of a rare earth polishing powder, in particular to a preparation method of a rare earth polishing powder used for surface polishing of precision devices in the electronic information industry such as integrated circuits, flat displays, and optical glasses. Background technique [0002] At present, various glass materials are widely used, and these materials need to undergo necessary surface polishing before being applied. In the early days, materials such as zirconia, iron oxide or silicon dioxide were mainly used to polish various glass surfaces. In recent years, considering the polishing efficiency and precision, polishing materials with rare earth oxides (especially cerium oxide) as the main component have been used. It is considered more suitable for surface polishing of glass materials. [0003] With the rapid development of electronic information technology, the demand for glass substrates such as le...

Claims

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Application Information

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IPC IPC(8): C01F17/00C09G1/02
Inventor 赵月昌贾长征郝祥蒙素玲
Owner 上海华明高纳稀土新材料有限公司
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