Method and device for manufacturing glass members with sealing material layer, and method for manufacturing electronic devices
A technology for sealing materials and manufacturing methods, which is applied in glass manufacturing equipment, welding equipment, glass molding, etc., can solve the problems of reduced airtightness of glass packaging, and achieve excellent sealing, low-cost reliability, and low-cost manufacturing Effect
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Embodiment 1）
[0103] Prepare to have Bi 2 o 3 83% by mass, B 2 o 3 5% by mass, ZnO11% by mass, Al 2 o 3 A bismuth-based glass frit with a composition of 1% by mass and an average particle size of 1 μm (softening temperature: 410°C) was prepared as a low-expansion filler with an average particle size of 0.9 μm and a specific surface area of 12.4 m 2 / g of cordierite powder, prepared with Fe 2 o 3 -Al 2 o 3 -MnO-CuO composition, average particle size 0.8μm, specific surface area 8.3m 2 / g of laser absorbing material powder. In addition, the said average particle diameter was measured with the Shimadzu Corporation laser diffraction particle size distribution analyzer (trade name: SALD2100) using a laser diffraction / scattering method. The same applies to the following examples.
[0104] The specific surface area of the cordierite powder and the laser-absorbing material powder was measured using a BET specific surface area measuring device (manufactured by Muntec, device name: Mac...
Embodiment 2～10）
[0111] Change the particle shape and content of cordierite powder and laser absorbing material powder in the sealing material, the film thickness of the frame-shaped coating layer, the scanning speed of the laser scanning area and the end area, the heating temperature of the frame-shaped coating layer, etc. Except for the conditions shown in Table 1 and Table 2, the frame-shaped coating layer was fired in the same manner as in Example 1 to form a sealing material layer. When the state of the sealing material layer was observed by SEM, it was confirmed that the entire sealing material layer was vitrified satisfactorily. The crack width at the irradiation end position was measured with a length measuring microscope. The results are shown in Table 1 and Table 2. In the same manner as in Example 1, after laminating the second glass substrate and the first glass substrate, the sealing material layer was irradiated with laser light through the second glass substrate, thereby sealin...
Embodiment 11）
[0117] Bismuth-based glass frit, cordierite powder, and laser absorbing material powder with the same composition and shape as in Example 1 were prepared, and 74.4 volume % (85.0 mass %) of bismuth-based glass frit, 14.9 volume % (6.6 mass %) of cordierite powder were prepared. ), and 10.7% by volume (8.4% by mass) of a laser absorbing material were mixed to produce a sealing material. 80 mass % of this sealing material was mixed with 20 mass % of the varnish of the same composition as Example 1, and the sealing material paste was prepared. Content (mass%) and specific surface area (m) of cordierite and laser absorbing material powder 2 / g) of the products (fluidity resistance factor of the sealing material) was 145.
[0118] Next, prepare an alkali-free glass (coefficient of thermal expansion: 38×10 -7 / K) for the second glass substrate (size: 90mm×90mm×0.7mm), apply the sealing material paste in the sealing area of the glass substrate in a frame-like manner with a dispen...
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Abstract
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