LTCC (Low Temperature Co-Fired Ceramic)-based passive LC (inductive-capacitive) humidity sensor

A technology of humidity sensor and inductance, which is applied in the field of sensors, can solve the problems of high cost and complicated process, and achieve the effects of reduced area, controllable precision and high stability

Inactive Publication Date: 2013-10-09
XIDIAN UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0005] Based on the above considerations, the present invention provides a small and passive LC humidity sensor realized by LTCC, which aims to solve the problems of traditional sensor structure and process complexity and high cost, and improve sensitivity and precision

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Embodiment Construction

[0024] The present invention will be described in detail below in conjunction with specific embodiments.

[0025] refer to figure 1 , the system of the present invention includes thirteen layers from top to bottom, among which the odd number layers are all ceramic dielectric layers, using FERRO A6, the relative permittivity is 5.9, the loss tangent is 0.002, the size is 25mm×15mm×0.3mm, and the even number The layers are all metal layer silver, and the thickness is 0.01mm. The first layer of dielectric layer has a window of 20mm×12mm to expose the second layer of interdigitated capacitor metal layer so that the capacitor can sense moisture.

[0026] refer to figure 2 , the fourth, sixth, eighth, tenth and twelfth layers of metal are inductive metal layers. The outer length of each metal coil is 22mm and 12.2mm, and the line width is 0.2mm. The coils of each layer are connected through the through holes in the fifth, seventh, ninth and tenth dielectric layers, and the diame...

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Abstract

The invention discloses an LTCC (Low Temperature Co-Fired Ceramic)-based passive LC (Inductive-Capacitive) humidity sensor. The LTCC-based passive LC humidity sensor comprises thirteen layers from top to bottom, wherein the layers with odd numbers are all ceramic dielectric layers, the layers with even numbers are all metal layers, the second capacitance metal layer is exposed out of a window of the first dielectric layer, so that the capacitance layer can sense the humidity, the fourth, sixth, eighth, tenth and twelfth metal layers are all inductance metal layers, and two ends of inductors positioned in the fourth and twelfth metal layers are connected with two ends of the second capacitance metal layer by through holes to form a parallel LC circuit. The LTCC-based passive LC humidity sensor is realized by utilizing an LTCC technology, and can be used for effectively reducing the production process and greatly reducing the production cost, and a quality factor of a ceramic material is high, so that the loss of the circuit is low. More importantly, the LTCC ceramic material is good in stability and not sensitive to environmental changes, and a ceramic sintering body is compact in structure and low in moisture permeability, so that the sensor can be applied in a high-humidity environment without encapsulation.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to realizing an LC humidity sensor by using LTCC technology. Background technique [0002] The sensor terminal is the application carrier of the Internet of Things. In addition to meeting the basic functional requirements such as item coding, physical quantity acquisition and storage, and wireless communication, the sensor unit must also consider passive, no or low power consumption, miniaturization and miniaturization. Therefore, the new low-cost, high-reliability, and wide-purpose sensor implementation technology is not only the commanding height of technology, but also has immeasurable broad prospects for marketization. [0003] Passive wireless sensors are composed of inductance and interpolation capacitance, which can be widely used in the measurement of sensing quantities such as humidity, gas concentration, etc., all to be measured are based on the influence of ca...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/22
Inventor 董刚李小菲杨银堂
Owner XIDIAN UNIV
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