Cascaded Mach-Zehnder interferometer based reconfigurable comb filter and preparation method thereof

A comb filter and interferometer technology, applied in the direction of instruments, light guides, optics, etc., can solve the problems of optical path difference, fixed output characteristics, unfavorable light sensing, etc., and achieve high thermal stability, low nonlinearity, The effect of low loss

Active Publication Date: 2013-11-20
SOUTHEAST UNIV
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Problems solved by technology

However, the comb filter based on PLC-type MZI generally has a fixed optical path difference between the two arms, which limits its output characteristics to be f...

Method used

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  • Cascaded Mach-Zehnder interferometer based reconfigurable comb filter and preparation method thereof
  • Cascaded Mach-Zehnder interferometer based reconfigurable comb filter and preparation method thereof
  • Cascaded Mach-Zehnder interferometer based reconfigurable comb filter and preparation method thereof

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preparation example Construction

[0040] The method for preparing a reconfigurable comb filter based on the cascaded Mach-Zehnder interferometer includes the following steps:

[0041] Step 10): Take a silicon substrate and clean the silicon wafer by wet chemical method. A silicon dioxide buffer layer with a thickness of 15 μm to 20 μm is prepared on the silicon substrate by the thermal oxidation method. Using plasma enhanced chemical vapor deposition method, the concentration of silane and nitrogen is 5% S i H 4 :N 2 , Temperature 250℃-400℃, doping germanium dioxide in silicon dioxide to obtain a waveguide layer 9 with a thickness of 8μm, using GeH with a gas concentration of 10% 4 :Ar, forming a waveguide layer with a thickness of 8μm, and the refractive index of the waveguide layer is higher than that of the silica buffer layer by 0.4%.

[0042] Step 20): On the waveguide layer, using photolithography and etching processes, prepare the PLC chip part based on the cascaded Mach-Zehnder interferometer type reconfigu...

Embodiment

[0051] The following describes the preparation method of the reconfigurable comb filter based on the cascaded Mach-Zehnder interferometer, so as to give a more detailed description of the above preparation method.

[0052] Step 10): Fabricate the silicon dioxide buffer layer 8 and the waveguide 9. Reference figure 2 As shown, it includes step 101), step 102) and step 103).

[0053] Step 101) Take a silicon substrate, clean the silicon wafer or substrate 7 with a wet chemical method to remove the dirt on the surface; then, after ultrasonic cleaning and drying of deionized water ultrasonic waves, the cleaning of the silicon wafer is completed;

[0054] Step 102) Prepare the silicon dioxide buffer layer 8. There are many methods for preparing the silicon dioxide buffer layer 8, such as chemical vapor deposition (CVD), flame hydrolysis (FHD), sol-gel method (Sol-Gel), Thermal oxidation method (TO) etc. Since the thermal oxidation method can oxidize more than 100 silicon wafers at the ...

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Abstract

The invention relates to a cascaded Mach-Zehnder interferometer based reconfigurable comb filter and a preparation method thereof. The filter comprises a planar lightwave circuit (PLC) chip, a first optical fiber array and a second optical fiber array, wherein the PLC chip comprises a silicon substrate, a silicon dioxide buffer layer is arranged on the silicon substrate, a waveguide is arranged on the silicon dioxide buffer layer, a coverage layer is arranged on the waveguide, and the waveguide comprises an input-stage Y branch, a first-length fixing arm, a second-length fixing arm, a first opening arm, a second opening arm, a third opening arm, a fourth opening arm, a first-stage 3dB coupler, a second-stage 3dB coupler and an output-stage 3dB coupler. The method comprises the steps of preparing the buffer layer and the waveguide on the silicon substrate so as to obtain a PLC chip portion, slicing and grinding the PLC chip portion, then, coupling the PLC chip portion with the optical fiber arrays, and finally, connecting corresponding optical fibers. The filter and the method have the advantages of reconfigurability, fine adjustable phase, flat-crest filtering and low-nonlinearity output.

Description

technical field [0001] The invention belongs to the technical field of integrated photonic devices, and relates to a cascaded Mach-Zehnder interferometer-based reconfigurable comb filter and a preparation method thereof. Background technique [0002] Mach-Zehnder Interferometer (full name in English: Mach-Zehnder Interferometer, abbreviation in the text: MZI) as a phase detection optical path structure has been widely used in optical sensing and communication systems. In optical fiber communication, MZI is usually used as optical fiber wavelength division multiplexer, optical modulator, optical switch and wavelength converter, etc.; in optical sensing system, due to its high sensitivity, MZI can be used to measure current, electromagnetic field, temperature, Weak physical quantities such as pressure. Comb filters based on Mach-Zehnder interferometers are key devices in optical communications, especially in dense wavelength division multiplexing systems, which play a key rol...

Claims

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Application Information

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IPC IPC(8): G02B6/293G02B6/125G02B6/132G02B6/136
Inventor 孙小菡蒋卫锋戚健庭
Owner SOUTHEAST UNIV
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