N type longitudinal silicon carbide MOS (metal oxide semiconductor) tube with high breakdown voltage
A high breakdown voltage, semiconductor tube technology, applied in the direction of semiconductor devices, circuits, electrical components, etc., can solve the problems of small breakdown voltage, strong electric field, device breakdown, etc., to increase the breakdown voltage and prevent local breakdown , Improve the effect of breakdown voltage
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[0020] Combine below Figure 4 , Figure 5 and Figure 6 To describe the present invention in detail, a high breakdown voltage N-type vertical silicon carbide metal oxide semiconductor transistor includes: an N-type substrate 1, a drain metal 11 is connected to one side of the N-type substrate 1, and a drain metal 11 is connected to the N-type substrate 1. The other side of the type substrate 1 is provided with an N-type drift region 2, which is characterized in that a P-type base layer 3 is arranged on the N-type drift region 2, and a N-type base layer 3 distributed in an array is arranged on the P-type base layer 3. Type source region 5 and P type body contact region 4, be provided with N type drift region projection 12 formed by N type drift region 2 between every pair of adjacent N type source region 5, the boundary of N type drift region projection 12 Extending into the corresponding breakdown voltage enhancement region 13, the breakdown voltage enhancement region 13 is...
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