Unlock instant, AI-driven research and patent intelligence for your innovation.

Method for preparing high-rigidity and high-elasticity modulus TiSiN protection coating

A protective coating and high-elasticity technology, which is applied in coating, metal material coating process, ion implantation plating, etc., can solve the problem of undisclosed preparation method of high-hardness and high-elastic-modulus TiSiN protective coating, high energy consumption, Low efficiency and other issues

Inactive Publication Date: 2014-01-15
SAMSON COATING NANO TECH SHANGHAI
View PDF8 Cites 13 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] In the prior art, there is no disclosure of the preparation method of TiSiN protective coating with high hardness and high elastic modulus, and the preparation method of the prior art consumes a lot of energy and has low efficiency in the preparation process

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for preparing high-rigidity and high-elasticity modulus TiSiN protection coating

Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0026] The instruments used in the preparation method of the present invention are respectively:

[0027] JGP-450 multi-target magnetron sputtering apparatus;

[0028] M308457 ultrasonic cleaning machine;

[0029] The test method adopted in the present invention:

[0030] EDAX energy spectrometer (EDS) analysis components;

[0031] D / MAX2550VB / PC type X-ray diffractometer (XRD) to determine the phase composition;

[0032] NANO Indenter G200 nano-indenter was used to measure hardness and elastic modulus.

[0033] The preparation method of the present invention comprises the steps:

[0034] (1) Substrate cleaning

[0035] Clean the mirror-polished substrate in absolute ethanol and acetone with ultrasonic waves for 5-10 minutes; then perform ion cleaning: install the sample and put it into the sampling chamber, and turn on the Ar gas after vacuuming to maintain the vacuum degree at 2-4Pa, carry out 30min ion bombardment on the substrate with intermediate frequency, the powe...

Embodiment 1

[0042] The specific process parameters of the TiSiN protective coating preparation method of the present invention are: target-base distance: 5cm; Ar / N 2 =7.6; Total air pressure: 0.4Pa; Temperature: 300°C; RF power: 350W. After testing, the hardness of the coating was 34.8GPa. The interior of the coating can be formed by Si 3 N 4 A nanocomposite structure in which the interface phase wraps TiN nano equiaxed grains, such as figure 1 shown.

Embodiment 2

[0044] The specific process parameters of the TiSiN protective coating preparation method of the present invention are: target-base distance: 5cm; Ar / N 2 =7.6; Total air pressure: 0.4Pa; Temperature: 100°C; RF power: 350W. After testing, the hardness of the coating was 32.98GPa.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
hardnessaaaaaaaaaa
anti-oxidation temperatureaaaaaaaaaa
hardnessaaaaaaaaaa
Login to View More

Abstract

The invention discloses a method for preparing a high-rigidity and high-elasticity modulus TiSiN protection coating. The method comprises the following preparation steps: (1) cleaning a matrix, and then carrying out ion cleaning; (2) preparing a TiSiN layer: sending the matrix processed by the step (1) in a sputtering chamber to deposit, controlling a Ti-Si composite target by a radio frequency cathode, and depositing the TiSiN coating with the thickness of 1-2 micrometers. The prepared TiSiN coating not only has high rigidity of 34.4 GPa, but also has excellent hhigh temperature oxidation resistance and corrosion resistance, the process is simple, the deposition speed is high, the cost is low, and the bonding strength is high; the prepared TiSiN coating has the advantages that the production efficiency is high, the energy consumption is low, the requirement on the equipment is low; the prepared TiSiN coating can be used as a high-speed dry cutting cutter coating and protection coatings in other fields.

Description

technical field [0001] The invention belongs to surface modification engineering technology, in particular to a high-hardness TiSiN protective coating and a preparation method thereof. Background technique [0002] With the continuous development of high-speed, high-precision cutting technology and the promotion of dry cutting technology, higher and higher requirements are put forward for tool performance: it is required to have high hardness, high elastic modulus, low friction coefficient and other mechanical properties and resistance High temperature oxidation performance. Currently commonly used TiN (titanium nitride) coating has a hardness of about 23GPa, and its oxidation resistance temperature is about 500°C; TiCN (titanium carbonitride) coating has a hardness of about 40GPa, but its high temperature oxidation resistance temperature is only 400°C; At present, the TiAlN (titanium aluminum nitride) coating with the best application prospect has a hardness of 35GPa, and ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/06
Inventor 吴舢红李伟薛增辉
Owner SAMSON COATING NANO TECH SHANGHAI