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Composite coating carbon/carbon composite material crucible and preparation method thereof

A carbon composite material and composite coating technology, applied in the field of composite coating carbon/carbon composite material crucible and its preparation, can solve problems such as erosion, and achieve the effects of inhibiting erosion, improving service life and high bonding strength

Active Publication Date: 2014-02-05
XIAN CHAOMA SCI TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, silicon carbide is still mixed with silicon-containing gas and SiO during use. 2 A chemical reaction occurs, causing the crucible to corrode

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] Step 1. According to the shape and performance requirements of the crucible to be prepared, use conventional methods to make a density of 0.20g / cm by using carbon fiber, carbon cloth and mesh tires 3 carbon fiber preform, and then the carbon fiber preform is densified to a density of 1.30g / cm 3 ; The method of said encryption is:

[0028] 101. Place the carbon fiber prefabricated body in a chemical vapor deposition furnace, use propylene (natural gas or a mixture of propylene and natural gas can also be used) as the carbon source gas to perform chemical vapor infiltration twice, and the process parameters of the second chemical vapor infiltration are all For: the carbon source gas flow rate is 20L / min, the chemical vapor infiltration temperature is 900°C, and the holding time is 30h;

[0029] 102. Put the carbon fiber prefabricated body that has undergone chemical vapor infiltration twice in 101 in an impregnation furnace for pressure impregnation with furfurone resin ...

Embodiment 2

[0037] Step 1. According to the shape and performance requirements of the crucible to be prepared, use conventional methods to make a density of 0.30g / cm by using carbon fiber, carbon cloth and mesh tires 3 carbon fiber preform, and then the carbon fiber preform is densified to a density of 1.45g / cm 3 ; The method of said encryption is:

[0038] 101. Put the carbon fiber prefabricated body in a chemical vapor deposition furnace, and use natural gas (or a mixture of propylene and natural gas) as the carbon source gas to perform chemical vapor infiltration once. The process parameters of chemical vapor infiltration are: carbon The source gas flow rate is 60L / min, the chemical vapor infiltration temperature is 1000°C, and the holding time is 40h;

[0039] 102. Put the carbon fiber prefabricated body that has undergone chemical vapor infiltration twice in 101 in an impregnation furnace for phenolic resin pressure impregnation (furfurone resin pressure impregnation, or furfurone r...

Embodiment 3

[0047] Step 1. According to the shape and performance requirements of the crucible to be prepared, use conventional methods to make a density of 0.50g / cm by using carbon fiber, carbon cloth and mesh tires 3 carbon fiber preform, and then the carbon fiber preform is densified to a density of 1.65g / cm 3 ; The method of said encryption is:

[0048] 101. Place the carbon fiber prefabricated body in a chemical vapor deposition furnace, and use a mixture of propylene and natural gas with a volume ratio of 1:1 (propylene or natural gas can also be used) as the carbon source gas to carry out chemical vapor phase infiltration twice. The process parameters of chemical vapor infiltration are: the flow rate of carbon source gas is 100L / min, the temperature of chemical vapor infiltration is 1100℃, and the holding time is 60h;

[0049] 102. Put the carbon fiber prefabricated body that has undergone chemical vapor infiltration twice in 101 in an impregnation furnace for pressure impregnatio...

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Abstract

The invention discloses a composite coating carbon / carbon composite material crucible comprising a carbon / carbon composite material crucible, a silicon carbide coating adhered on the inner surface of the carbon / carbon composite material crucible, a silicon coating adhered on the silicon carbide coating, and a silicon nitride coating adhered on the silicon coating. Also, the invention discloses a preparation method of the composite coating carbon / carbon composite material crucible. According to the invention, silicon nitride is combined with the silicon carbide composite coating, such that corrosion of silicon-containing steam upon the inner profile of the carbon / carbon composite material crucible can be effectively inhibited, and crucible service life is greatly improved. With a chemical vapor reaction method, SiC coating in-situ production is achieved. Compared with a traditional SiC coating prepared with a CVD method, the bonding strength with the carbon / carbon substrate is higher. Also, excessive Si coating is produced on site, such that Si source is provided for the production of the silicon nitride coating. The silicon nitride coating produced with high-purity nitrogen has improved bonding strength, such that corrosion resistance of the crucible is further improved.

Description

technical field [0001] The invention belongs to the technical field of thermal field components for high-temperature furnaces, and in particular relates to a composite coating carbon / carbon composite material crucible and a preparation method thereof. Background technique [0002] At present, carbon material crucibles (graphite crucibles or carbon / carbon composite material crucibles) are generally used for the crucibles used in single crystal silicon pulling furnaces. During the single crystal silicon pulling process, silicon vapor and silicon-containing gas (SiO) and quartz crucibles (mainly The composition is SiO 2 ) can chemically react with the carbon material, resulting in the erosion of the carbon material crucible until it fails. Therefore, how to effectively inhibit the erosion of the carbon material is a key technical issue to improve the service life of the carbon material crucible used in the single crystal silicon drawing furnace. [0003] The use of silicon car...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B41/85C04B35/83
Inventor 张永辉肖志超赵松赵俊彭志刚胡振英谷立民侯卫权苏君明孟凡才
Owner XIAN CHAOMA SCI TECH
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