Flexible multi-joint GaAs solar battery and manufacturing method thereof

A technology of solar cells and solar cells, which is applied in circuits, photovoltaic power generation, electrical components, etc., can solve the problems of reducing the conversion efficiency of solar cells and affecting the light absorption of solar cells, and achieves the effect of not being easily broken and saving space

Active Publication Date: 2014-02-19
YANGZHOU CHANGELIGHT
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Problems solved by technology

And some flexible substrate materials are often insulators, so the positive and negative electrodes can only be made on the same side, and the num

Method used

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  • Flexible multi-joint GaAs solar battery and manufacturing method thereof
  • Flexible multi-joint GaAs solar battery and manufacturing method thereof
  • Flexible multi-joint GaAs solar battery and manufacturing method thereof

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Embodiment Construction

[0042] Specific production methods, such as figure 2 Shown:

[0043] 1. Firstly, on the second substrate 100 (the material that can be used as the second substrate: N-type GaAs), use spin coating technology to coat a layer of organic polymer-polyimide with a thickness of 50-120 μm as Flexible substrate 200.

[0044] During spin coating, a unique spin coating method is used to first coat the low-viscosity polyimide (1800-2000cp) on the substrate by rotating at a high speed of 5000 rpm to form a uniform layer. Better basement membrane. Then reduce the rotation speed to 1000 rpm, and coat the high-viscosity polyimide (5000-6000cp) on the substrate with the base film while the substrate is rotating. A polyimide layer having a thickness of 50 to 120 μm is formed.

[0045] 2. After spin-coating, use photoresist mask technology to coat a layer of photoresist on the polyimide, and choose a low speed to uniform the coating, because the high speed will cause the previously coated p...

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Abstract

The invention discloses a flexible multi-joint GaAs solar battery and a manufacturing method of the flexible multi-joint GaAs solar battery, and belongs to the technical field of semiconductor materials. Firstly, a flexible substrate and a battery epitaxial structure which is bonded with metal in the same way and composed of a base battery, a middle battery and a top battery are respectively prepared, and a first battery substrate is manufactured at the outer side of the top battery; secondly, a Ti layer, a Pt layer and an Au layer are sequentially plated on the back of the base battery of the battery epitaxial structure in an vacuum evaporation mode, and the battery epitaxial structure is bonded with a metal layer fully covering the outer surface of a polyimide coating; thirdly, Si3N4 deposits on the surface of the bonded metal layer, and then the first battery substrate on the battery epitaxial structure is removed through alkaline corrosion liquid; fourthly, two upper electrodes and an antireflection film are manufactured on the top battery of the battery epitaxial structure; finally, after a manufactured chip and a Si wafer are bonded on a second substrate through photoresist, and then the second substrate is removed through alkaline corrosion liquid. The manufactured flexible multi-joint GaAs solar battery is wholly flexible, can be applied to surfaces of different shapes, and is not broken easily.

Description

technical field [0001] The invention relates to a high-efficiency multi-junction solar cell preparation technology, which belongs to the technical field of semiconductor materials. Background technique [0002] As a clean energy source, solar cells have great application prospects in national defense and civilian applications. With the development of the world's aerospace industry, high-efficiency compound semiconductor solar cells have been widely valued by academia and industry. [0003] At present, the mainstream solar cells for space use Ge or GaAs as the substrate material. The substrate with a certain thickness (about 150 μm) has the disadvantages of heavy weight, inflexibility, and easy breakage, and this rigid substrate is more difficult. Playing the role of mechanical support, it must be an independent component and cannot provide power for the aircraft. In the case of a certain carrying capacity of the rocket, the larger the space occupied by the power supply com...

Claims

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Application Information

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IPC IPC(8): H01L31/06H01L31/0216H01L31/0224H01L31/18
CPCY02E10/50H01L31/02168H01L31/0304H01L31/0687H01L31/184Y02E10/544Y02P70/50
Inventor 李俊承杨凯白继峰许杰林吴洪清张永蔡建九方天足张银桥王向武
Owner YANGZHOU CHANGELIGHT
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