Fabrication method of thick gas electron multiplier detector diaphragm

Abstract

The invention discloses a method for manufacturing a thick gas electron multiplication detector membrane plate, which is characterized in that it comprises the following steps: cutting and cleaning double-sided copper-clad plates; drilling positioning holes; pressing photoresist dry films on both sides simultaneously; The outer graphic film and the circuit board with the photoresist dry film pressed are aligned and placed on the exposure machine for exposure; develop, etch to remove copper, and remove the photoresist dry film; CNC machine tools punch out holes on the double-sided copper clad board Array; spray double-sided copper-clad board. The advantage of the present invention is that: it adopts the whole board micro-etching process to manufacture THGEM diaphragms in a large area, and has successfully produced THGEM diaphragms of 300mm×300mm, and the uniformity of the rim is consistent; the use of fully automatic circuit board manufacturing equipment , can be mass-produced, and the yield rate is above 95%; THGEM membrane plate and readout anode plate are independent of each other, and can be designed and processed into different sizes and shapes according to needs.

Description

technical field [0001] The invention relates to a method for manufacturing a diaphragm, in particular to a method for manufacturing a thick gas electron multiplication detector diaphragm, which belongs to the field of etching processing. Background technique [0002] Thick gas electron multiplier detector (THGEM) is a new type of microstructured gas detector, its structure is as follows: figure 1 As shown, in the airtight chamber 11 (the airtight chamber 11 is filled with working gas, which can be mixed with inert gases such as argon and xenon and quenching gases such as carbon dioxide, isobutane and methane), the drift electrode 1 , the readout anode 9 and the preamplifier 10 are arranged parallel to each other, and a THGEM diaphragm is also arranged in parallel between the drift electrode 1 and the readout anode 9. The THGEM diaphragm is composed of an upper copper layer 3, an insulating substrate 4 and a lower copper layer. 5, the THGEM film plate is provided with an arr...

AI Technical Summary

Problems solved by technology

Among them, the most difficult to control is the lamination process. Since the lamination needs to be aligned with the center of each hole, otherwise the performance of the detector will be affected due to the poor quality of a single hole. Therefore, the existing process is used for THGEM membrane plate The production of the film has high requirements on the drilling accuracy, laminating positioning accuracy, and laminating working environment, which increases the difficulty of making large-area THGEM diaphragms.

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