Human blood glucose test chip based on gallium nitride material
A gallium nitride and chip technology, applied in the field of electronics, can solve problems affecting the depth of heterojunction potential wells, changes in device operating current, etc., to achieve the effects of increasing feasibility and accuracy, improving measurement accuracy, and reducing manufacturing costs
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Embodiment 1
[0017] Such as figure 1 As shown, the present invention includes a substrate 1, and the substrate 1 adopts one of a sapphire substrate, a silicon substrate, a gallium nitride substrate or a silicon carbide substrate, and a U-shaped gallium nitride layer 2 is formed on the upper surface of the substrate 1 by epitaxial growth. An N-type or U-type aluminum gallium nitride layer 3 is grown on the upper surface of the U-type gallium nitride layer 2, and a thin U-type gallium nitride coating layer 4 is grown on the upper surface of the aluminum gallium nitride layer 3; The gallium cladding layer 4 is provided with a source 5 and a drain 6, the source 5 and the drain 6 cover the U-shaped gallium nitride cladding layer 4, and form an ohmic contact with the U-shaped gallium nitride cladding layer 4 The source electrode 5 and the drain electrode 6 are separated from each other, and the gap between the source electrode 5 and the drain electrode 6 is a gate 9; the source electrode 5 and t...
Embodiment 2
[0022] In order to further improve the response of the chip to glucose concentration and reduce background noise, the GaN layer except the source 5, gate 9 and drain 6 can be removed by plasma etching (ICP), and the removal depth needs to reach the U-shaped Gallium nitride layer 2, in this way, the carriers can only form a loop through the channel under the gate, but cannot go around through the edge, because the channel under the gate is modulated by the electric field of the gate, so it can be more Sensitive and accurate reaction grid electric field changes, thereby measuring the concentration of glucose.
[0023] Such as figure 2 As shown: the human blood glucose test chip based on gallium nitride material includes a substrate 1, and the substrate 1 adopts one of a sapphire substrate, a silicon substrate, a gallium nitride substrate or a silicon carbide substrate, and the upper surface of the substrate 1 is processed by epitaxy Grow and form a U-type gallium nitride layer...
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Abstract
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