Method for preparing aluminum nitride ceramic substrate by adopting composite powder grain shape

A technology of aluminum nitride ceramics and composite powders, which is applied in the field of preparing aluminum nitride ceramic substrates by using composite powder grain shapes, which can solve the problems of high equipment requirements, harsh sintering process, environmental pollution, etc., and achieve improved diffusion capacity and accelerated Sintering process, the effect of saving production costs

Active Publication Date: 2014-05-21
莱鼎电子材料科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the complex preparation process of aluminum nitride powder and high equipment requirements, the price of alumina powder is expensive, and the sintering process of aluminum nitride is relatively harsh. These two complex factors lead to difficulties i

Method used

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Effect test

Embodiment 1

[0020] The method for preparing an aluminum nitride ceramic substrate by using a composite powder grain type comprises the following steps:

[0021] (1) Preparation of aluminum nitride and alumina composite powder: Add high-purity aluminum powder into the ball mill tank in the high-energy ball mill, inject nitrogen gas, seal, the ball-to-material ratio is 2:1, and the ball milling time is 2 hours; after ball milling The aluminum powder is introduced into the crucible of alumina or aluminum nitride in the nitrogen blowing at a flow rate of 5L / min, and naturally accumulates with a bulk density of 4.5g / m 2 , the aluminum powder in the crucible is exposed to the air, the aluminum powder spontaneously ignites, and aluminum nitride and aluminum oxide composite powder are obtained after the combustion ends;

[0022] (2) Plasma calcination of aluminum nitride and alumina composite powder: apply a coaxial pressure of 45Mpa to the aluminum nitride and alumina composite powder, keep the ...

Embodiment 2

[0029] The method for preparing an aluminum nitride ceramic substrate by using a composite powder grain type comprises the following steps:

[0030] (1) Preparation of aluminum nitride and alumina composite powder: Add high-purity aluminum powder into the ball mill tank in the high-energy ball mill, pass in nitrogen gas, seal it, the ball-to-material ratio is 5:1, and the ball milling time is 3 hours; after ball milling The aluminum powder is introduced into the crucible of alumina or aluminum nitride under nitrogen blowing at a flow rate of 6L / min, and naturally accumulates with a bulk density of 4.5g / m 2 , the aluminum powder in the crucible is exposed to the air, the aluminum powder spontaneously ignites, and aluminum nitride and aluminum oxide composite powder are obtained after the combustion ends;

[0031] (2) Plasma calcination of aluminum nitride and alumina composite powder: apply a coaxial pressure of 45Mpa to the aluminum nitride and alumina composite powder, keep t...

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PUM

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Abstract

The invention discloses a method for preparing an aluminum nitride ceramic substrate by adopting a composite powder grain shape. The method is innovatively characterized by comprising the following steps: calcining aluminum nitride and aluminum oxide composite powder through plasma activation, adding a sintering aid, an organic mixed solvent and other auxiliary solvents for performing ball-milling, performing vacuum defoaming, performing casting molding, performing pre-sintering and sintering on the casting green bodies to obtain the aluminum nitride ceramic substrate. The composite powder of aluminum oxide and aluminum nitride serves as a raw material, the surface state of the powder is changed through plasma calcining, the activity and diffusing capacity of atoms on the surface of the powder are improved, the sintering process is increased, and the sintering temperature is reduced. The powder is sintered in a reducing atmosphere in the sintering process, and novel ecological atoms are formed through a reduction reaction, so that the sintering process is improved, the production cost is saved, and the method is suitable for industrial production.

Description

technical field [0001] The invention relates to a method for preparing an aluminum nitride ceramic substrate, in particular to a method for preparing an aluminum nitride ceramic substrate by using a composite powder grain type. Background technique [0002] Aluminum nitride is a new type of ceramic material with excellent comprehensive performance. It has a series of excellent properties such as excellent thermal conductivity, reliable electrical insulation, low dielectric constant and dielectric loss, non-toxic and thermal expansion coefficient matching silicon. , is considered to be an ideal material for a new generation of high-density semiconductor substrates and electronic device packaging. Aluminum nitride substrates can be used in the fields of hybrid integrated circuits, semiconductor power devices, power electronic devices, optoelectronic devices, semiconductor refrigeration stacks, microwave devices, etc., as substrates and packaging materials. The aluminum nitrid...

Claims

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Application Information

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IPC IPC(8): C04B35/582C04B35/622C04B35/64
Inventor 颜建军何竟宇马立斌张志涛
Owner 莱鼎电子材料科技有限公司
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