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Non-brazed MOCVD spray nozzle capable of being washed online by chlorine gas

A non-brazing and nozzle technology, applied in gaseous chemical plating, metal material coating process, coating, etc.

Active Publication Date: 2014-07-23
南昌硅基半导体科技有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the manufacturing process of the MOCVD nozzle of this invention still uses solder to braze thousands of stainless steel capillaries and stainless steel orifice plates, it cannot be cleaned online with chlorine gas. Provides the possibility to do away with the brazing process

Method used

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  • Non-brazed MOCVD spray nozzle capable of being washed online by chlorine gas
  • Non-brazed MOCVD spray nozzle capable of being washed online by chlorine gas
  • Non-brazed MOCVD spray nozzle capable of being washed online by chlorine gas

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] In order to abandon the stainless steel brazing process that is not resistant to chlorine, the design of the spray nozzle plate 20 conforms to the EDM process: after cutting out a plurality of refrigerant channels 14 by the wire EDM method, each wire cutting wire is blocked by the arc welding method Seam 24, and then vertically cut out a plurality of air jet seams 5 with electric spark; The surface area of ​​the air jet seam 5 processed by EDM is smaller than that of machining under the condition of the same roughness, so the epitaxial memory effect is small. The reason why the air jet slit 5 is disconnected in the length direction is that the first is to distribute the air evenly, and the second is that the nozzle plate of the nozzle should be provided with reinforcing ribs 21; the thickness of the nozzle plate 20 increases, and the depth of the corresponding air jet slit 5 is also deep. Therefore, the resistance to the gas is large, and the gas can be sprayed evenly fr...

Embodiment 2

[0025] Example 3:

[0026] Embodiment 3 is basically the same as Embodiment 1, the difference lies in:

Embodiment 3

[0027] For the processing of the spray head spray plate 20, it is preferable to use electric cremation to drill all the air spray slits 5 at one time.

[0028] This needs to be prepared in advance with copper electrodes complementary in shape to all air jet slots 5 . This processing method is a common practice in the mold industry when EDM cavity molds. With such a copper electrode, all the air-jet slits 5 can be quickly punched out at one time, and the copper electrode can be used repeatedly. (A structural invention is incomplete if the processing method is not mentioned. Therefore, I still write the processing method. With the structure and the processing method of the nozzle, there is the advantage of the present invention-it can be washed with chlorine)

[0029] It should be noted that the above-mentioned embodiments are only descriptions of the present invention rather than limitations of the present invention, and any non-essential replacement or modified inventions tha...

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Abstract

The invention discloses a non-brazed MOCVD spray nozzle capable of being washed online by chlorine gas. According to the non-brazed MOCVD spray nozzle, the traditional coarse drawn stainless steel capillary spray pipes are replaced by air spraying gaps molded by electric spark machining, so that the MOCVD spray nozzle has a small surface area and the extension memory effect of the MOCVD spray nozzle can be reduced. Since the MOCVD spray nozzle is non-brazed, the spray nozzle can be washed online by chlorine gas and therefore, the production efficiency of MOCVD is enhanced and the application range of the MOCVD spray nozzle is expanded. The MOCVD spray nozzle is simple to manufacture, high in reliability and low in future operation fee.

Description

technical field [0001] The invention relates to metal organic chemical vapor deposition (MOCVD) equipment, in particular to a non-brazed MOCVD nozzle which can be cleaned online with chlorine gas. Background technique [0002] Metal-organic compound vapor deposition growth equipment (MOCVD) has been widely used to grow semiconductor light-emitting materials for light-emitting diodes (LEDs), such as the current InGaAlN semiconductor material system, which is used to manufacture light in the wavelength range from ultraviolet to green. LED has an absolute competitive advantage. In the epitaxial production process of this material system, a very troublesome process is the cleaning of the reaction tube after epitaxial growth (equivalent to the process of washing the pot after cooking). If it is not cleaned or cleaned thoroughly, it will cause poor product repeatability between furnaces, until the product is scrapped. [0003] At present, the MOCVD equipment market is mainly occ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/06C23C16/455
Inventor 方文卿江风益熊传兵王小兰赵鹏
Owner 南昌硅基半导体科技有限公司
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