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Light resistance stripping method and light resistance stripping device

A stripping device and photoresist technology, applied to chemical instruments and methods, cleaning methods and utensils, cleaning methods using liquids, etc., can solve problems affecting the stripping effect, aluminum film or IGZO corrosion, and affecting the quality of flat panel displays, etc., to achieve Simple structure, reduced IGZO corrosion, and easy operation

Active Publication Date: 2014-08-20
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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Problems solved by technology

[0005] When the substrate for liquid crystal display or OLED is provided with aluminum layer or IGZO layer, a problem affecting the stripping effect of its photoresist stripping step is: when the photoresist stripping solution contacts with water, it reacts to generate a strong alkali substance, which will cause damage to the substrate. Corrosion of aluminum film or IGZO (Indium Gallium Zinc Oxide) causes liquid crystal displays and organic electroluminescent displays to produce oblique watermarks Mura visible to the naked eye after lighting up, which affects the quality of flat panel displays

Method used

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  • Light resistance stripping method and light resistance stripping device

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Embodiment Construction

[0029] In order to further illustrate the technical means adopted by the present invention and its effects, the following describes in detail in conjunction with preferred embodiments of the present invention and accompanying drawings.

[0030] see figure 1 , the invention provides a photoresist stripping method, comprising the following steps:

[0031] Step 1, providing a substrate for removing the photoresist layer;

[0032] Step 2, irradiating the photoresist layer to be removed with ultraviolet light;

[0033] Step 3, peeling off the photoresist on the surface of the substrate with a photoresist stripping solution in the stripping tank;

[0034] Step 4. After the photoresist stripping is completed, remove the photoresist stripping solution on the substrate with an air knife in the buffer zone;

[0035] Step 5, after the air knife blows through, clean the remaining photoresist stripping solution on the substrate in a washing tank.

[0036] The substrate is provided with...

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Abstract

The invention provides a light resistance stripping method and a light resistance stripping device. The light resistance stripping method comprises the steps: 1, providing a substrate of a to-be-removed light resistance layer; 2, irradiating the to-be-removed light resistance layer by adopting ultraviolet light; 3, stripping light resistance on the surface of the substrate by using a light resistance stripping solution in a stripping groove; 4, after the light resistance stripping is completed, removing the light resistance stripping solution on the substrate by using an air knife on a buffer region; and 5, after the air knife blows, cleaning the light resistance stripping solution remained on the substrate on a washing tank. According to the light resistance stripping method, the aluminum corrosion and IGZO (Indium Gallium Zinc Oxide) corrosion in the light resistance stripping process can be maximally reduced, and the quality of a flat panel display is improved.

Description

technical field [0001] The invention relates to the field of flat panel display processing, in particular to a photoresist stripping method and a photoresist stripping device. Background technique [0002] With the vigorous development of science and technology, the display has developed from the early cathode ray tube (Cathode Ray Tude, CRT) display to the current liquid crystal display (Liquid Crystal Display, LCD) and organic light emitting display (organic light emitting display, OLED). [0003] Liquid crystal displays have many advantages such as thin body, power saving, and no radiation, and have been widely used. Most of the liquid crystal displays currently on the market are backlight liquid crystal displays, which include a liquid crystal display panel and a backlight module. The production of LCD panels mainly includes three processes: "front-end Array process", "middle-end Cell process", and "back-end module assembly". Among them, the front-stage Array process i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/42
CPCC11D7/3218C11D7/34G03F7/42C11D2111/22B08B3/08B08B3/102B08B5/02B08B7/0057
Inventor 张旭东
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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