DBD (Dielectric Barrier Discharge) low temperature plasma generating device and polymer film surface treatment method

A low-temperature plasma, polymer film technology, applied in the direction of plasma, electrical components, etc., can solve the problems of low processing efficiency, poor processing effect, plasma non-uniformity, etc., to improve the processing capacity and processing efficiency, increase the number of and area, water contact angle reduction effect

Active Publication Date: 2014-12-10
INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Usually, a parallel plate plasma reactor consists of two metal electrodes and one or two dielectric layers between the metal electrodes. By applying voltage to the metal electrodes, only low-temperature plasma can be formed between the two dielectric layers, which limits the uniform plasma. The formation of large volumes and large areas limits the realization of large-area polymer film processing
If the electrode area is increased, it is very easy to cause inhomogeneity of the plasma, and it is very easy to damage the dielectric layer and thin film material, resulting in poor processing effect and low processing efficiency.

Method used

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  • DBD (Dielectric Barrier Discharge) low temperature plasma generating device and polymer film surface treatment method
  • DBD (Dielectric Barrier Discharge) low temperature plasma generating device and polymer film surface treatment method
  • DBD (Dielectric Barrier Discharge) low temperature plasma generating device and polymer film surface treatment method

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Experimental program
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Effect test

Embodiment 1

[0038] Such as figure 1 As shown, the DBD low-temperature plasma generating device includes a power source 1 and a DBD plasma reactor 2 .

[0039] The reaction chamber of the DBD plasma reactor 2 is provided with two metal electrodes 21: a metal electrode A and a metal electrode B, and at least three layers of dielectric plates 22 are arranged between the two metal electrodes 21, and between adjacent dielectric plates 22 It has a gap of 0.5mm-3mm, which is the gas gap during discharge treatment, hereinafter referred to as "air gap". In the same DBD low-temperature plasma generation device, the width of these gaps can be all equal or unequal; metal electrodes A is grounded, and the metal electrode B is connected to the high-voltage output end of the power source 1 .

[0040] The two metal electrodes 21 can be either parallel plate electrodes or cylindrical electrodes, as long as the two opposite end surfaces of the two metal electrodes 21 are parallel to each other.

[0041] ...

Embodiment 2

[0044] On the basis of Embodiment 1, in this embodiment, spacers 23 are used to separate adjacent dielectric plates 22, so that a gap is formed between adjacent dielectric plates 22, and the height of the spacers 23 is the width of the gap. Generally, the dielectric board 22 is in a rectangular shape. In this embodiment, four spacers 23 are respectively arranged on the four corners of the adjacent dielectric boards 22 . In this embodiment, the dielectric plates 22 are separated by the spacers 23 to provide a discharge air gap between the dielectric plates 22, which is very convenient, and the removal and installation of the dielectric plates 22 are also more convenient.

Embodiment 3

[0046] On the basis of Embodiment 1 or Embodiment 2, in this embodiment, the DBD low-temperature plasma generating device further includes a gas cylinder 3 , a resistor divider 5 and a sampling resistor 6 .

[0047] The reaction chamber of the DBD plasma reactor 2 is provided with an air inlet 25, an air outlet 26 and an observation window 24: the air outlet 26 is used to evacuate the reaction chamber and discharge unnecessary gases; To pass into the reaction gas, it is connected to the gas cylinder 3 through the air inlet pipeline, and a flow meter 4 is also arranged on the air inlet pipeline between the air inlet 25 and the gas cylinder 3, in order to change and select the gas flow rate; the observation window 24 is used It is used for observing plasma discharge and diagnosing plasma characteristics. In practical applications, the number of flowmeters, gas cylinders, and gas types can be set as required.

[0048] The input terminal of the resistance divider 5 is connected b...

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Abstract

The invention relates to the technical field of material surface treatment and particularly discloses a DBD (Dielectric Barrier Discharge) low temperature plasma generating device and a polymer film surface treatment method. The DBD low temperature plasma generating device comprises a power source and a DBD plasma reactor; at least three layers of dielectric slabs are arranged in a reaction chamber of the DBD plasma reactor; a gap is formed between every two adjacent layers of dielectric slabs. The polymer film surface treatment method comprises performing treatment through the DBD low temperature plasma generating device. Discharge can be formed between every two layers of dielectric slabs to form uniform good low temperature plasma, the polymer film treatment can be performed on the bilateral sides of every layer of dielectric slab which is located in the middle, the treatment of one layer of polymer film can be performed through the dielectric slab which cover two electrodes, and accordingly the number and the area of the single treatment polymer films can be improved. The single treatment rate of the polymer films is increased and the treatment efficiency is high by the polymer film surface treatment method.

Description

technical field [0001] The invention relates to the technical field of material surface treatment, in particular to a DBD low-temperature plasma generating device and a polymer film surface treatment method. Background technique [0002] Polymer films generally have good electrical insulation properties, such as polyethylene, polypropylene, polytetrafluoroethylene, polyimide, etc., have been widely used in electrical, electrical, electronics, chemical and other industrial fields, but most of the film surface It has poor hydrophilicity and poor high temperature resistance, so it needs to be treated gently and effectively. The low-temperature plasma generated by Dielectric Barrier Discharge (DBD) has good non-equilibrium properties, such as mild gas temperature and high electron temperature, and is very suitable for surface treatment of polymer film materials. [0003] The research on the application of low-temperature non-equilibrium plasma in the surface treatment of polyme...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/24B29C71/00
Inventor 李喜李杰谢宇彤章林文龙继东董攀蓝朝晖杨振王韬彭宇飞郑乐何佳龙
Owner INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
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