Ingaas quantum dot solar cell and manufacturing method thereof
A technology of solar cells and manufacturing methods, applied in the field of solar cells, can solve the problems of insufficient efficiency of solar cells, and achieve the effects of improving conversion efficiency and long life
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Embodiment 1
[0037] Such as Figure 1-2 As shown, the present embodiment provides a method for manufacturing an InGaAs quantum dot solar cell, comprising the following steps:
[0038] Step S1: Using the epitaxial growth method to sequentially epitaxially grow the buffer layer 6, the base electrode 5, the InGaAs quantum dot superlattice structure 4, the emitter electrode 3, the window layer 2 and the contact layer 1, and then fabricate the InGaAs quantum dots Solar cell epitaxial wafer, InGaAs quantum dot superlattice structure 4 includes at least one layer of In x Ga 1-x As quantum dot layer, and set in In x Ga 1-x The spacer layer between As quantum dot layers, where, In x Ga 1-x The In composition in the As quantum dot layer is 0.0≤x≤1.0. Specifically, In x Ga 1-x In the As quantum dot layer, the In composition is 0.4≤x≤1.0, preferably, 0.5≤x≤1.0; In x Ga 1-x The deposition rate of the As quantum dot layer is 0.01-1.0 monolayer per second, preferably 0.05-0.5 monolayer per seco...
Embodiment 2
[0048] Such as figure 2 As shown, the present embodiment provides an InGaAs quantum dot solar cell, including a plurality of battery cells connected in series and / or in parallel, and the battery cells sequentially include a back electrode 8, a GaAs substrate 7, a buffer layer 6, a substrate from top to bottom. Pole 5, InGaAs quantum dot superlattice structure 4, emitter 3, window layer 2, contact layer 1 and upper electrode 9, InGaAs quantum dot superlattice structure 4 includes at least one layer of In x Ga 1-x As quantum dot layer, and set in In x Ga 1-x Spacer layers between As quantum dot layers. Among them, In x Ga 1-x In of the As quantum dot layer x Ga 1-x The In composition in As is 0.4≤x≤1.0, preferably 0.5≤x≤1.0. In x Ga 1-x The thickness of the As quantum dot layer is 1.8-10.0 monolayer, preferably 1.8-6.0 monolayer. The spacer layer can be GaAs material, GaAlAs material, GaP material, GaAsP material, GaInP material, GaAlInP material or GaAlAsP material,...
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