A kind of preparation method of the polycrystalline silicon solar cell of rie texture

Abstract

The invention discloses a method for preparing a polycrystalline silicon solar cell by RIE texturing. The method comprises the following steps that (1) plasma dry etching is used for removing a front surface damage layer of a polycrystalline silicon chip, and then RIE texturing is conducted; (2) a chained wet chemical processing method is used for sequentially conducting back face etching polishing, RIE damage layer removing and post cleaning processing on the silicon chip; (3) the texturing surface of the silicon chip is subjected to phosphorus source diffusion in a back-to-back chip inserting mode; (4) the diffused silicon chip is subjected to wet etching, surface PSG is removed, and then a passivation antireflection film is deposited on the front surface of the silicon chip; (5) back silver and aluminium paste are printed on the back face of the silicon chip and then are dried; then front silver is printed on the front surface of the silicon chip and then is sintered, and accordingly the polycrystalline silicon solar cell can be obtained. According to the method, the technology steps can be reduced, the using amount of chemicals is also reduced simultaneously, and the operation cost of an enterprise is greatly lowered.

Description

technical field [0001] The invention relates to a method for preparing a RIE textured polycrystalline silicon solar cell, which belongs to the technical field of solar cells. Background technique [0002] Conventional fossil fuels are increasingly depleted. Among the existing sustainable energy sources, solar energy is a safe, reliable, affordable and easy-to-obtain green energy. Therefore, solar cell modules have received more and more attention, and high conversion efficiency and low cost are the main trends in the development of solar cells and the goals pursued by technology researchers. In order to obtain higher photoelectric conversion efficiency, in addition to the high quality of the crystalline silicon material itself and the ability to form ideal PN junctions and other inherent characteristics, it is also necessary to have a good light trapping effect on the surface of the cell. The light-trapping effect is usually achieved by surface texturing, which is an import...

AI Technical Summary

Problems solved by technology

Obviously, compared with the traditional polysilicon solar cell manufacturing process, the RIE textured polysilicon solar cell manufacturing process has the following disadvantages: (1) The removal of wire-cut damage layer and RIE damage layer removal and post-cleaning process steps are added , thereby increasing the operating cost of the process accordingly; (2) The use of chemical corrosion leads to a large amount of chemicals used, and the treatment of expensive chemical waste liquid and the storage and operation of large volumes of acid and alkali will also greatly increase the operating costs of the enterprise; (3) Repeated chemical solution treatment increases the brittleness of silicon wafers that are thinner and thinner in order to save costs. In addition, more transfers between processes will increase the breakage rate of silicon wafers