Waveguide type nonlinear crystal allowing THz waves to be produced efficiently and manufacturing method thereof

Abstract

The invention discloses a waveguide type nonlinear crystal allowing THz waves to be produced efficiently and a manufacturing method of the waveguide type nonlinear crystal. The crystal is provided with a cycle reversal nonlinear crystal round rod, and a layer of surface plasma cladding is deposited on the periphery of the cycle reversal nonlinear crystal round rod. The cycle reversal nonlinear crystal round rod is a gallium arsenide crystal round rod, or a gallium selenide crystal round rod or a gallium phosphide crystal round rod. The manufacturing method comprises the steps that two or more semiconductor epitaxial wafers of which the nonlinear coefficients are positive and two or more semiconductor epitaxial wafers of which the nonlinear coefficients are negative are arranged at intervals and are manufactured into a cycle reversal nonlinear crystal based on the direct bonding technology; the bonded cycle reversal nonlinear crystal is manufactured into the cycle reversal nonlinear crystal round rod in a columnar structure with the diameter being 50-100 microns based on the etching and grinding method; the layer of plasma modulation cladding is deposited on the surface of the cycle reversal nonlinear crystal round rod based on the film coating and etching method. The waveguide type nonlinear crystal allows pump light and the produced THz waves to effectively coincide and be propagated, so that the production efficiency of the THz waves is improved.

Description

technical field [0001] The invention relates to a nonlinear crystal. In particular, it relates to a waveguide nonlinear crystal and a manufacturing method for generating terahertz waves with high efficiency based on surface plasmon effect and quasi-phase matching periodicity. Background technique [0002] Terahertz (THz) waves refer to electromagnetic waves with a frequency between 0.1THz and 10THz and a wavelength between 0.03mm-3mm. Its special position makes terahertz technology a bridge connecting electronics and photonics. THz waves The interaction with matter contains rich physical and chemical information, so terahertz waves are widely used in basic research fields such as molecular spectroscopy and biological spectral imaging analysis, and terahertz spectral imaging has become one of the most important application fields of current terahertz technology one. The terahertz radiation source used in the current terahertz spectral imaging technology is mainly a broadban...

AI Technical Summary

Problems solved by technology

In order to improve the difference frequency efficiency, the pump light and the generated THz beam must coincide with each other, but because the wavelength difference between the pump light and the THz wave is too large, the diffraction effect will make the coincidence of the two beams very difficult, and the THz The wave will diverge due to the diffraction effect, which seriously affects the output efficiency of the THz wave

Images