Arc ion plating device for coating of inner wall of long pipe

Abstract

The invention relates to the field of preparation of a film and a coating, and particularly relates to a special arc ion plating cylindrical target arc source and an accessory part, which are used for depositing a film and a coating on the inner surface of the long pipe and the inner wall of a hole of a deep-hole device so as to realize a purpose of modifying the inner wall surfaces of military industrial and special parts. The arc ion plating device is characterized by being provided with a vacuum chamber, a cylindrical target arc source, an arc striking device, a sample rack for fixing the pipe, a circular gas homogenizing pipe, a sample rack heating system, a cathode target material and sample rack bias system, a vacuumizing system, a control cabinet, a cathode target power supply, a bias power supply and a worktable. The invention aims at providing the arc ion plating device for realizing the coating of the inner wall of the long pipe through the cylindrical target arc source and the accessory part, so that a purpose of protecting and modifying the inner surface of the long pipe and the inner wall of the hole of the deep-hole device can be realized.

Description

technical field [0001] The invention relates to the field of film and coating preparation, in particular to the development of a special arc ion plating columnar target arc source and accessory parts, which are used for depositing films and coatings on the inner surface of a long pipe and the inner wall of a deep hole device hole to realize The purpose of surface modification of inner wall of military and special parts. Background technique [0002] In the industry, there are a large number of inner walls of metal workpieces that need to be modified, especially for long pipe fittings or barrels, such as the pump barrel of oilfield oil pumps, petrochemical synthesis equipment, oil and water pipelines, especially those used in the military. Gun barrels and rocket tubes work under corrosion or high temperature, and are subject to corrosion, wear and high temperature oxidation, or are affected by the above-mentioned various working conditions at the same time. Internal surface ...

AI Technical Summary

Problems solved by technology

[0002] In the industry, the inner wall of a large number of metal workpieces needs to be modified, especially for long pipes or cylinders, such as pump cylinders of oil field pumps, petrochemical synthesis equipment, pipelines for oil and water transportation, especially for military use. Gun barrels and rocket tubes work under corrosion or high temperature, and are subjected to corrosion, wear and high temperature oxidation, or are affected by the above-mentioned multiple working conditions at the same time, and the current treatment methods cannot meet the requirements of such harsh environments. Internal Surface Modification and Strengthening Requirements

[0003] Compared with the outer surface of the component, the modification treatment of the inner wall of the pipe has the following technical problems: First, due to the limitation of the shape and size of the inner cavity, some treatment methods are difficult to implement, or even if it can be implemented, it is difficult to obtain a good improvement. Sexual effect, especially for long pipes with small diameter-to-length ratio

Second, limited by the shape and size of the inner cavity, it is difficult for some processing media to enter the interior of the pipe, or even if it enters, it is difficult to ensure the uniformity of the modified layer

Third, limited by the shape of the inner cavity and the relatively small size of the diameter length, the bonding strength between the modified layer and the inner wall of the pipe is poor, which limits the excellent performance of the modified layer.

Some methods of adding permanent magnets or magnetic field coils around the tube in an attempt to use the magnetic field to confine the plasma movement still require the plasma to enter the tube from the nozzle, but because the plasma density decreases sharply in the longitudinal direction of the tube, the film deposited inside the tube The layer is very uneven in the length direction of the pipe, and the deposition depth of the film layer is very limited, affected by the diameter-to-length ratio, the maximum does not exceed 1:3

Therefore, the current arc ion plating device is difficult to achieve the purpose of protecting and modifying the inner surface of long pipes or the inner wall of deep hole devices.

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