A microwave frequency measurement chip and its application method and manufacturing method

Abstract

The invention discloses a microwave frequency measurement chip as well as an applying method and a preparing method thereof. The microwave frequency measurement chip comprises an optical grating coupler, a phase modulator, a filter based on a micro-ring resonant cavity and a bus waveguide. An optical signal is coupled by a coupling optical grating and enters the chip, an optical carrier signal is transmitted in the bus waveguide and first passes the phase modulator, the optical carrier signal is modulated by an unknown microwave signal to be measured through an intensity modulator, the modulated signal enters the micro-ring resonant cavity through the bus waveguide, two paths of optical power are respectively output at the upper and lower speech path ends of the filter, and the unknown microwave signal can be determined through calculating the specific value of the measured optical power. The microwave frequency measurement chip realizing the detection of the unknown microwave signal by a silicon-based photonic integrated chip has the advantages of small chip size, light weight, high integration, low cost and electromagnetic interference resistance. Meanwhile, the invention further discloses an applying method and a preparing method of the chip.

Description

technical field [0001] The invention relates to the field of planar optical waveguide integration, in particular to a microwave frequency measurement chip based on silicon-based optoelectronic technology and its application method and manufacturing method. Background technique [0002] In electronic information warfare, it is of great significance to quickly determine the frequency of intercepted radio frequency signals, which can be used for interception and eavesdropping of radar signals and communication signals, electronic countermeasures and anti-countermeasures, etc. With the development of millimeter wave technology and optoelectronic technology, the operating frequency of modern electronic information warfare equipment has been continuously developed to a wider frequency band, and the content of electronic information warfare has also developed from communication confrontation in World War I to World War II Radio frequency countermeasures such as radar countermeasure...

AI Technical Summary

Problems solved by technology

The currently reported schemes for microwave frequency measurement by photonic means mainly include the following three schemes: one is to construct a function of unknown frequency and time, and the microwave signal modulates the optical carrier, and the two sidebands are measured after passing through a dispersive medium. The magnitude of the delay difference generated to determine the unknown frequency, but this method is limited by the instrument and the measurement error is large; the second is to construct a function of the unknown microwave frequency and space, under small signal modulation, the optical sideband and the optical carrier The interval in the frequency domain is converted into a spatial distribution, so as to detect the microwave frequency of the signal to be tested, generally using a chirped Bragg grating, a free space diffraction grating, a combination of prisms, etc.

The third is to construct the function of unknown microwave frequency and optical power intensity, filter the optical sidebands through optical comb filters or fiber gratings, and convert microwave frequency information into light intensity changes, which is also one of the main research directions at present. , the advantage of this scheme is that the low-speed photodetector can meet the needs, but there are also some problems such as limited frequency measurement range

In the current reports, the above three solutions are mostly based on discrete optical components, which are expensive and the test system is bulky and less stable.

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