A passivation anti-reflection film for high pid resistant polycrystalline battery and its preparation process
A passivation reduction and reflection film technology, applied in the field of solar cells, can solve the problems of lower conversion efficiency, attenuation, and low PID of the battery, and achieve the effects of reducing reflectivity, improving attenuation characteristics, and increasing short-circuit current
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Embodiment 1
[0022] 1). Pretreatment of the original silicon wafer, the pretreatment includes the processes of texturing, diffusion and etching in the battery process;
[0023] 2). Using high-voltage ionized or ultraviolet ionized oxygen to form a thin layer of dense SiO on the surface of the polycrystalline silicon wafer after etching x Layer 1, the refractive index is 1.65, and the film thickness is 0.8nm;
[0024] 3). Use PECVD equipment to coat the remaining film layer on the diffusion surface, cancel the pre-deposition step when coating the film, and coat SiO first x Layer 2, the refractive index is 1.65, and the film thickness is 2nm; then coat high refractive index SiN x Layer 3, the refractive index is 2.20, and the film thickness is 20nm; finally, a single layer of SiN is plated x layer, the refractive index is 2.05, and the film thickness is 60nm;
[0025] 4).Use the traditional battery printing process to print the back electrode, aluminum back field, positive grid line and p...
Embodiment 2
[0031] 1). Pretreatment of the original silicon wafer, the pretreatment includes the processes of texturing, diffusion and etching in the battery process;
[0032] 2). Using high-voltage ionized or ultraviolet ionized oxygen to form a thin layer of dense SiO on the surface of the polycrystalline silicon wafer after etching x Layer 1, the refractive index is 1.65, and the film thickness is 0.8nm;
[0033]3). Use PECVD equipment to coat the remaining film layer on the diffusion surface, cancel the pre-deposition step when coating the film, and coat SiO first x Layer 2 has a refractive index of 1.65 and a film thickness of 10nm; the third layer is a high refractive index SiNx layer 3 with a refractive index of 2.20 and a film thickness of 20nm; the top layer is a double-layer SiNx layer 3 and the bottom layer SiN has a refractive index of 2.15. The thickness of the film layer is 20nm, the refractive index of the upper layer SiN is 2.05, and the thickness of the film layer is 35n...
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