A kind of preparation method of spongy graphene/zinc oxide hybrid structure flexible gas sensor
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A technology of gas sensor and hybrid structure, which is applied in the field of sensors, can solve the problems of unretrieved experimental research, etc., and achieve the effect of excellent gas sensing characteristics, good conductivity, and expanded detection range
Inactive Publication Date: 2017-11-10
SHANDONG NORMAL UNIV
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Problems solved by technology
In theory, it should have better gas-sensing performance. So far, we have not retrieved relevant experimental research, which is an important starting point for invention research
Method used
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Embodiment 1
[0037] Graphene growth on Ni foam substrates and eventually graphene / ZnO hybrid structures, such as figure 1 As shown, the following preparation steps are included:
[0038] 1. Take nickel foam with a size of 6cm×8cm and place it in a tube furnace;
[0039] 2. Turn on the vacuum pump to pump the air pressure of the tube furnace to the ultimate vacuum state of 3×10 -6 Torr;
[0040] 3. Keep vacuum 3×10 -6 After Torr for 15 minutes (the effect of vacuum for 15 minutes is to remove impurities, air, etc. inside the quartz tube to ensure that the reaction chamber is clean), the air pressure of the quartz tube 3 is raised to 3 × 10 -3 Torr;
[0041] 4. Set the hydrogen flow meter to 100sccm, and inject hydrogen into the vacuum chamber;
[0042] 5. After the tube furnace temperature rises to 300°C, anneal at a constant temperature for 20 minutes;
[0043] 6. After the tube furnace temperature rises to 10,000°C, inject methane into the vacuum chamber, set the gas flow meter to 2...
Embodiment 2
[0056] Growth of graphene on foamed copper substrates and eventually growth of graphene / ZnO hybrid structures, such as figure 1 As shown, the following preparation steps are included:
[0057] 1. Take foam copper with a size of 6cm×8cm and place it in a tube furnace;
[0058] 2. Turn on the vacuum pump to pump the air pressure of the tube furnace to the ultimate vacuum state of 3×10 -6 Torr;
[0059] 3. Keep vacuum 3×10 -6 After Torr for 15 minutes (the effect of vacuum for 15 minutes is to remove impurities, air, etc. inside the quartz tube to ensure that the reaction chamber is clean), the air pressure of the quartz tube 3 is raised to 3 × 10 -3 Torr;
[0060] 4. Set the hydrogen flow meter to 100sccm, and inject hydrogen into the vacuum chamber;
[0061] 5. After the tube furnace temperature rises to 300°C, anneal at a constant temperature for 20 minutes;
[0062] 6. After the tube furnace temperature rises to 10,000°C, inject methane into the vacuum chamber, set the ...
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Abstract
The invention relates to a preparation method of a flexible gas-sensitive sensor with a spongy graphene / zinc oxide mixed structure. The preparation method comprises the following steps of: firstly placing foam metal into a heating area of a vacuum reaction furnace, vacuumizing, simultaneously heating to a preset temperature, charging hydrogen into the vacuum reaction furnace; after heating to the preset temperature, introducing a carbon source and simultaneously keeping the flow of the hydrogen constant, thus obtaining a substrate directly deposited with graphene after 10-180 minutes; then soaking the prepared graphene / foam metal in etching solution, displacing off the foam metal, fishing out flexible graphene from the etching solution, cleaning, and fishing the graphene out by using a flexible substrate; finally, with the flexible substrate coated with conductive graphene as a cathode, a platinum sheet as a counter electrode, and Ag / Cl as a reference electrode, in the filling solution, adopting by taking Zn-containing solution as electrolyte, carrying out electrolytic growth to obtain a zinc-oxide nano structure. The preparation method has the beneficial effects that the sensitivity and the response speed are improved, and the development prospect on the aspects of environmental monitoring and chemical-gas detection and the like is important.
Description
technical field [0001] The invention relates to a method for preparing a nano gas sensor, in particular to a method for preparing a gas sensor based on a three-dimensional graphene and zinc oxide nano-mixed structure, and belongs to the technical field of sensors. Background technique [0002] Gas sensors play an important role in the current environment, chemical gas detection, and food industry hygiene detection. The research on flexible substrate low-temperature gas sensor is of great significance to expand the monitoring range of the sensor, optimize the preparation process, and reduce the use loss and risk. The development of transparent / flexible gas-sensing materials with high sensitivity, high selectivity, fast response and good stability plays an important role in the preparation of high-performance gas sensors. [0003] A single graphene or zinc oxide gas sensor has its defects, and it is inconvenient to carry and cannot be bent. It is necessary to find a new prepa...
Claims
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