A kind of preparation method of spongy graphene/zinc oxide hybrid structure flexible gas sensor
A technology of gas sensor and hybrid structure, which is applied in the field of sensors, can solve the problems of unretrieved experimental research, etc., and achieve the effect of excellent gas sensing characteristics, good conductivity, and expanded detection range
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0037] Graphene growth on Ni foam substrates and eventually graphene / ZnO hybrid structures, such as figure 1 As shown, the following preparation steps are included:
[0038] 1. Take nickel foam with a size of 6cm×8cm and place it in a tube furnace;
[0039] 2. Turn on the vacuum pump to pump the air pressure of the tube furnace to the ultimate vacuum state of 3×10 -6 Torr;
[0040] 3. Keep vacuum 3×10 -6 After Torr for 15 minutes (the effect of vacuum for 15 minutes is to remove impurities, air, etc. inside the quartz tube to ensure that the reaction chamber is clean), the air pressure of the quartz tube 3 is raised to 3 × 10 -3 Torr;
[0041] 4. Set the hydrogen flow meter to 100sccm, and inject hydrogen into the vacuum chamber;
[0042] 5. After the tube furnace temperature rises to 300°C, anneal at a constant temperature for 20 minutes;
[0043] 6. After the tube furnace temperature rises to 10,000°C, inject methane into the vacuum chamber, set the gas flow meter to 2...
Embodiment 2
[0056] Growth of graphene on foamed copper substrates and eventually growth of graphene / ZnO hybrid structures, such as figure 1 As shown, the following preparation steps are included:
[0057] 1. Take foam copper with a size of 6cm×8cm and place it in a tube furnace;
[0058] 2. Turn on the vacuum pump to pump the air pressure of the tube furnace to the ultimate vacuum state of 3×10 -6 Torr;
[0059] 3. Keep vacuum 3×10 -6 After Torr for 15 minutes (the effect of vacuum for 15 minutes is to remove impurities, air, etc. inside the quartz tube to ensure that the reaction chamber is clean), the air pressure of the quartz tube 3 is raised to 3 × 10 -3 Torr;
[0060] 4. Set the hydrogen flow meter to 100sccm, and inject hydrogen into the vacuum chamber;
[0061] 5. After the tube furnace temperature rises to 300°C, anneal at a constant temperature for 20 minutes;
[0062] 6. After the tube furnace temperature rises to 10,000°C, inject methane into the vacuum chamber, set the ...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com