Trapezoid primitive optical grating with single-stage diffraction properties

Abstract

The invention provides a trapezoid primitive optical grating with single-stage diffraction properties. According to the core concept, primitives of the certain shape are distributed in a certain mode so that the penetration rates or reflective rates in the optical grating period direction can be distributed according to a trapezoid function. According to the specific manufacturing process of two design modes, the trapezoid primitives are sequentially stacked together in the one-dimensional direction on the bottom face of an optical grating substrate, or one trapezoid primitive and another inverted trapezoid of the same parameter as the trapezoid primitive are sequentially stacked together in a spaced mode to form the function with the specific trapezoid penetration rate or reflective rate in the optical grating period direction; copying is performed on the other dimension direction of the bottom face of the optical grating substrate by using the optical grating period as the interval length; each trapezoid primitive is in an isosceles trapezoid shape, the upper bottom edge and the lower bottom edge of the isosceles trapezoid are related to the optical grating period, and the height of the trapezoid is determined according to the practical application situation. The obtained trapezoid primitive optical grating can completely ignore high-order diffraction, the positive and negative one-order absolute diffraction efficiency theoretical value of the trapezoid primitive optical grating is 6.93%, the diffraction efficiency of the trapezoid primitive optical grating is larger than that of a sinusoidal grating with the same period and duty ratio as the trapezoid primitive optical grating, and the trapezoid primitive optical grating will bring new changes to spectral analysis, light source monochromatization and other aspects.

Description

technical field [0001] The present invention relates to the field of diffraction gratings, more specifically, to a trapezoidal elemental grating used as a spectrometer splitting element or a monochromator wavelength separation / selection element, and to a trapezoidal elemental grating produced by transferring from the trapezoidal elemental grating Reflective gratings and replica gratings, and to methods of making these gratings. Background technique [0002] Diffraction grating is an ancient optical element, invented by American astronomer David. Rittenhouse (Written by Hartley. Jia Weiyi, translated by Qin Xiaomei. Diffraction grating, 1990), German physicist J.V. Fraunhofer first applied it to serious science Research (Liu Zhancun. Review of the Development History of Diffraction Gratings. Physical Experiments), inferred the material composition of the distant solar surface by measuring the solar spectrum. A diffraction grating can be regarded as an integration of multiple...

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Problems solved by technology

[0005] However, the above-mentioned harmonic-free grating also has some defects. For example, the absolute diffraction efficiency of the positive and negative orders of the photon sieve type is about 1% lower, and the theoretical diffraction efficiency of the quantum lattice grating is close to 6.25%, but its processing is more difficult. , which severely limits the fabrication of quantum lattice gratings with high linear density

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