Trapezoid primitive optical grating with single-stage diffraction properties
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A single-stage diffraction, trapezoidal technology, applied in the field of diffraction grating, can solve the problems of limited quantum lattice grating, low absolute diffraction efficiency, and difficult processing, etc., and achieve the effect of high diffraction efficiency and convenient design and manufacture.
Inactive Publication Date: 2015-07-08
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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[0005] However, the above-mentioned harmonic-free grating also has some defects. For example, the absolute diffraction efficiency of the positive and negative orders of the photon sieve type is about 1% lower, and the
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[0023] According to the actual application, determine the period size of the grating;
[0024] The trapezoidal primitives are stacked sequentially along the one-dimensional direction of the grating base; the other dimension along the grating base is copied according to the length of the grating period, such as figure 1 as shown, figure 1 The horizontal direction of is the periodic direction of the grating, and the vertical direction is the other one-dimensional direction of the grating;
[0025] The trapezoidal primitive of the grating is an isosceles trapezoid, and its upper and lower bases are related to the period d of the grating, which are d / 6 and 5d / 6 respectively, and the height of the trapezoid is designed to be d;
[0026] The base of the trapezoidal primitive grating is a transparent substrate;
[0027] The trapezoidal primitive of the grating is the high reflectivity material coated on the transparent substrate or the small gap between the high reflectivity materi...
Embodiment 1
[0030] This embodiment discloses a planar transmissive trapezoidal primitive grating designed based on the present invention. The trapezoidal primitive grating is shown in figure 1 ,include:
[0031] 1) Transparent silicon carbide substrate;
[0032] 2) Form multiple high-reflectivity trapezoidal primitive ring structures with two-dimensional distribution on a transparent substrate;
[0033] 3) Fabricate planar transmissive trapezoidal primitive gratings by micromachining techniques such as photolithography and electron beam etching.
[0034] figure 1 The part composed of white trapezoidal primitives is a material coated with high reflectivity; the black part is a fully transparent substrate.
[0035] The unique structure of the planar transmissive trapezoidal primitive grating designed based on the invention makes the designed and manufactured grating have single-order diffraction characteristics and high diffraction efficiency characteristics.
[0036] This example has o...
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Abstract
The invention provides a trapezoid primitive optical grating with single-stage diffraction properties. According to the core concept, primitives of the certain shape are distributed in a certain mode so that the penetration rates or reflective rates in the optical grating period direction can be distributed according to a trapezoid function. According to the specific manufacturing process of two design modes, the trapezoid primitives are sequentially stacked together in the one-dimensional direction on the bottom face of an optical grating substrate, or one trapezoid primitive and another inverted trapezoid of the same parameter as the trapezoid primitive are sequentially stacked together in a spaced mode to form the function with the specific trapezoid penetration rate or reflective rate in the optical grating period direction; copying is performed on the other dimension direction of the bottom face of the optical grating substrate by using the optical grating period as the interval length; each trapezoid primitive is in an isosceles trapezoid shape, the upper bottom edge and the lower bottom edge of the isosceles trapezoid are related to the optical grating period, and the height of the trapezoid is determined according to the practical application situation. The obtained trapezoid primitive optical grating can completely ignore high-order diffraction, the positive and negative one-order absolute diffraction efficiency theoretical value of the trapezoid primitive optical grating is 6.93%, the diffraction efficiency of the trapezoid primitive optical grating is larger than that of a sinusoidal grating with the same period and duty ratio as the trapezoid primitive optical grating, and the trapezoid primitive optical grating will bring new changes to spectral analysis, light source monochromatization and other aspects.
Description
technical field [0001] The present invention relates to the field of diffraction gratings, more specifically, to a trapezoidal elemental grating used as a spectrometer splitting element or a monochromator wavelength separation / selection element, and to a trapezoidal elemental grating produced by transferring from the trapezoidal elemental grating Reflective gratings and replica gratings, and to methods of making these gratings. Background technique [0002] Diffraction grating is an ancient optical element, invented by American astronomer David. Rittenhouse (Written by Hartley. Jia Weiyi, translated by Qin Xiaomei. Diffraction grating, 1990), German physicist J.V. Fraunhofer first applied it to serious science Research (Liu Zhancun. Review of the Development History of Diffraction Gratings. Physical Experiments), inferred the material composition of the distant solar surface by measuring the solar spectrum. A diffraction grating can be regarded as an integration of multiple...
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IPC IPC(8): G02B5/18
CPCG02B5/1828
Inventor 曹磊峰杨祖华范全平魏来王静张强强陈勇晏卓阳谷渝秋巫殷忠周维民
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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