Fe-Pt sintered compact sputtering target and manufacturing method therefor

A technology of sputtering target and sintered body, which is applied in the manufacture of disc carriers, sputtering coating, sputtering coating, etc. It can solve problems such as abnormal discharge, lower product yield, and powder generation, and achieve reduction The amount of powder and the effect of suppressing abnormal discharge

Active Publication Date: 2015-07-15
JX NIPPON MINING & METALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] Hexagonal BN (a compound of boron and nitrogen), which is the above-mentioned non-magnetic material, exhibits excellent performance as a lubricant, but when used as a raw material for powder metallurgy, it is difficult to produce a high-density sintered body due to its poor sinterability
In addition, when the density of such a sintered body is low, when the sintered body is processed into a target, there is a problem that failures such as cracking and chipping occur, and the yield decreases.
In addition, when the density is low, there are problems in that a large number of holes are generated in the target, and these holes cause abnormal discharge, and particles (waste attached to the substrate) are generated during sputtering, which reduces the yield of products

Method used

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  • Fe-Pt sintered compact sputtering target and manufacturing method therefor
  • Fe-Pt sintered compact sputtering target and manufacturing method therefor
  • Fe-Pt sintered compact sputtering target and manufacturing method therefor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0059] Fe—Pt alloy powder, hexagonal BN powder (flake shape) were prepared as raw material powders, and these powders were weighed so as to be 70(50Fe—50Pt)—30BN (mol%).

[0060] Next, Fe—Pt alloy powder and zirconia balls as grinding media were put into a media agitation mill with a capacity of 5 L, and treated at a rotation speed of 300 rpm for 2 hours. The average particle size of the treated Fe—Pt alloy powder was 10 μm. Then, the powder taken out from the media agitation mill and the BN powder were mixed with a V-type mixer and further mixed using a 150 μm mesh sieve, and the mixed powder was filled in a carbon mold and hot-pressed.

[0061] The hot pressing conditions were set to a vacuum environment, a heating rate of 300° C. / hour, a holding temperature of 1200° C., a holding time of 2 hours, and pressurization at 30 MPa from the start of heating to the end of holding. Cool naturally in the chamber directly after holding.

[0062] Next, hot isostatic pressing is perfo...

Embodiment 2

[0066] Prepare Fe-Pt alloy powder, BN powder (flaky), SiO 2 powder as raw material powder. Weigh these powders to achieve 70(50Fe-50Pt)-5SiO 2 -25BN (mol%).

[0067] Next, Fe-Pt alloy powder and SiO 2 The powder was put into a media agitation mill with a capacity of 5 L together with zirconia balls as a grinding medium, and treated at a rotational speed of 300 rpm for 2 hours. The average particle size of the treated Fe—Pt alloy powder was 10 μm. Then, the powder taken out from the media agitation mill and the BN powder were mixed with a V-type mixer and further mixed using a 100 μm mesh sieve, and the mixed powder was filled in a carbon mold and hot-pressed.

[0068] The conditions of the hot pressing were the same as in Example 1: vacuum environment, heating rate 300° C. / hour, holding temperature 1100° C., holding time 2 hours, and pressurization at 30 MPa from the start of heating to the end of holding. Cool naturally in the chamber directly after holding.

[0069] Ne...

Embodiment 3

[0072] Fe—Pt alloy powder, BN powder (flaky shape), Ag powder, and C (flaky graphite) powder were prepared as raw material powders. These powders were weighed to achieve 58(35Fe-10Pt)-20Ag-20BN-2C (mol%).

[0073] Next, Fe—Pt alloy powder and zirconia balls as grinding media were put into a media agitation mill with a capacity of 5 L, and treated at a rotation speed of 300 rpm for 2 hours. The average particle size of the treated Fe—Pt alloy powder was 10 μm. Then, the powder taken out from the media agitation mill was mixed with BN powder, C powder and Ag powder with a V-type mixer, and then mixed with a mortar, and the resultant was filled in a carbon mold and hot-pressed.

[0074] The hot pressing conditions were the same as in Example 1. The vacuum environment, the heating rate of 300° C. / hour, the holding temperature of 950° C., and the holding time of 2 hours were set, and the pressure was applied at 30 MPa from the start of heating to the end of holding. Cool naturall...

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Abstract

An Fe-Pt sintered compact sputtering target containing BN characterized in that the intensity ratio of the X-ray diffraction peak intensity of a hexagonal BN (002) plane in a plane level with the sputtering surface with respect to the X-ray diffraction peak intensity of a hexagonal BN (002) plane in a cross-section perpendicular to the sputtering surface is 2 or more. The present invention addresses the problem of providing a sputtering target with which manufacture of a magnetic film in thermally assisted magnetic recording media is possible and particles that are generated during sputtering are reduced.

Description

technical field [0001] The invention relates to an Fe-Pt based sintered body sputtering target for manufacturing a magnetic thin film in a heat-assisted magnetic recording medium and a manufacturing method thereof. Background technique [0002] In the field of magnetic recording represented by hard disk drives, materials based on Co, Fe, or Ni, which are ferromagnetic metals, are used as materials for magnetic thin films in magnetic recording media. For example, a Co-Cr-based or Co-Cr-Pt-based ferromagnetic alloy containing Co as a main component is used as a magnetic thin film of a hard disk employing an in-plane magnetic recording method. In addition, for the magnetic thin film of the hard disk adopting the perpendicular magnetic recording method put into practical use in recent years, a composite material containing a Co—Cr—Pt-based ferromagnetic alloy mainly composed of Co and nonmagnetic inorganic particles is often used. Furthermore, from the viewpoint of high product...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34B22F3/14C22C1/05C22C5/04C22C38/00
CPCC22C33/02C22C38/00G11B5/851C22C38/002C23C14/3414C22C5/04
Inventor 荻野真一
Owner JX NIPPON MINING & METALS CO LTD
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