Nanometer composite structure protective coating made from high hardness CrAlSiN and preparation method of nanometer composite structure protective coating

A protective coating and nano-composite technology, applied in coating, metal material coating process, ion implantation plating, etc., can solve the problems of high equipment cost, low elastic modulus, complicated process, etc., and achieve low equipment requirements , low cost, fast deposition effect

Active Publication Date: 2015-09-23
SHANGHAI NEWARC COATING TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] In the above-mentioned existing nanostructured coatings and their preparation technologies, no coatings with a high hardness exceeding 40 GPa have been seen, and the elastic modulus is also low; in addition

Method used

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Experimental program
Comparison scheme
Effect test

preparation example Construction

[0040] The preparation method of the high-hardness CrAlSiN nanocomposite structure protective coating comprises the following preparation steps:

[0041] (1) Substrate cleaning

[0042] Cleaning the mirror-polished substrate in absolute ethanol and acetone with ultrasonic waves for 5-10 minutes; the frequency of the ultrasonic waves is 15-30 kHz.

[0043] Then carry out ion cleaning: put the substrate into the sampling chamber, turn on Ar gas after vacuuming, maintain the vacuum degree at 2-4Pa, use radio frequency power supply to carry out ion bombardment on the substrate for 30min, and the power is 80-100W.

[0044] (2) Preparation of CrN transition layer

[0045] The substrate treated in step (1) is sent to the sputtering chamber to deposit the CrN transition layer. The Cr target is controlled by a DC cathode, and deposited with a DC power supply for 3 to 6 minutes to obtain a CrN transition layer of 200 to 300 nm; the Ar gas flow rate is 10-50 sccm, the N2 gas flow is 10...

Embodiment 1

[0050] The specific process parameters in the present embodiment step (3) are: target base distance 5cm; Ar / N 2 Flow ratio=5; total air pressure 0.4Pa; substrate temperature 300°C; sputtering power 350W. After testing, the hardness of the protective coating with nanocomposite structure obtained is 43.6GPa; the inner layer of the coating is formed by Si 3 N 4 The nano-composite structure of CrAlN nano equiaxed grains wrapped by the interface phase, the X-ray phase analysis shows that the coating is a face-centered cubic structure, the preferred orientation is (200) and (111), and it grows in the form of columnar crystals.

Embodiment 2

[0052] The specific process parameters in the present embodiment step (3) are: target base distance 5cm; Ar / N 2 Flow ratio=7; total air pressure 0.6Pa; substrate temperature 100°C; sputtering power 320W. After testing, the obtained nanocomposite structure protective coating has a hardness of 40.7GPa.

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Abstract

The invention relates to a nanometer composite structure protective coating made from high hardness CrAlSiN and a preparation method of the nanometer composite structure protective coating. The preparation method comprises the following steps: (1) cleaning matrixes, and then performing ion cleaning; (2) preparing a CrN transition layer: sending the matrixes processed in the step (1) to a sputtering chamber, so that the CrN transition layer is deposited, a Cr target material is controlled by a direct current cathode, and a 200-300nm CrN transition layer is deposited; and (3) preparing a CrAlSiN layer, wherein a CrAlSi composite target material is controlled by a radio frequency cathode, and 2-4 mum of a CrAlSiN nanometer composite coating is deposited on the surface of the CrN transition layer. The coating not only has high hardness of 43.6GPa, but also has excellent high-temperature oxidation resistance and excellent corrosion resistance, so that the protective coating disclosed by the invention can be used as a protecting coating for a high-speed dry cutting cutter and equipment with high loads in other fields. The preparation method has the characteristics of simple technology, high deposition speed, low cost, high bond strength and the like, and has the advantages of high production efficiency, low energy consumption, low equipment requirements, and the like.

Description

technical field [0001] The present invention relates to a new type of hard protective coating, in particular to a high-hardness CrAlSiN nano-composite protective coating and a preparation method thereof, which is used as a protective coating for cutting tools, molds and other parts that bear wear resistance, impact and other loads , belongs to the technical field of material surface modification. Background technique [0002] With the development of advanced manufacturing industry, higher and higher requirements are put forward for the surface properties of materials, and the surface of materials is required to have high hardness, wear resistance, corrosion resistance and high temperature resistance. Coating a layer of superhard coating on the surface of the material is an effective way to improve the surface performance of the material. Its development meets the high technical requirements of the modern manufacturing industry for metal cutting tools, molds and other equipme...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/06
Inventor 冯利民李伟
Owner SHANGHAI NEWARC COATING TECH CO LTD
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