Manufacturing method for Ni50Mn34In12Co4 alloy film of high smoothness

A technology of alloy thin film and flatness, applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of large roughness, composition deviation from target, etc., achieve strong anisotropy and simple preparation process , the effect of easy industrial production

Active Publication Date: 2015-11-04
DALIAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The present invention provides a high flatness Ni 50 mn 34 In 12 co 4 Preparation method of alloy thin film

Method used

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  • Manufacturing method for Ni50Mn34In12Co4 alloy film of high smoothness
  • Manufacturing method for Ni50Mn34In12Co4 alloy film of high smoothness
  • Manufacturing method for Ni50Mn34In12Co4 alloy film of high smoothness

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Experimental program
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Effect test

Embodiment 1

[0022] The test alloy targets were selected from four metal elements with a purity of 99.99at.%-Ni, 99.95at.%-Mn, 99.99at.%-In, and 99.95at.%-Co. According to the molar ratio, 50 parts of Ni, 34 parts of Mn, 12 parts of In and 4 parts of Co are placed in a vacuum non-consumable electrode electric arc furnace. Before melting, the furnace cavity is evacuated to a degree of 5×10 -3 Pa, filled with Ar protective gas. In order to make the composition of the material uniform, the material is turned over by a manipulator before each smelting, and the smelting is turned over at least 4 times, and magnetic stirring is added during the smelting process. After smelting, an ingot with a diameter of 50 mm was obtained. After being ground on the grinding wheel, the ingot was placed on a wire electric discharge machine and cut into a circular target with a diameter of 3mm×2mm. Quartz glass with a specification of 30mm×30mm×3mm is selected as the substrate of the thin film. Pretreatment of...

Embodiment 2

[0024] The test alloy targets were selected from four metal elements with a purity of 99.99at.%-Ni, 99.95at.%-Mn, 99.99at.%-In, and 99.95at.%-Co. According to the molar ratio, 50 parts of Ni, 34 parts of Mn, 12 parts of In and 4 parts of Co are placed in a vacuum non-consumable electrode electric arc furnace. Before melting, the furnace cavity is evacuated to a degree of 5×10 -3Pa, filled with Ar protective gas. In order to make the composition of the material uniform, the material is turned over by a manipulator before each smelting, and the smelting is turned over at least 4 times, and magnetic stirring is added during the smelting process. After smelting, an ingot with a diameter of 50 mm was obtained. After being ground on the grinding wheel, the ingot was placed on a wire electric discharge machine and cut into a circular target with a diameter of 3mm×2mm. Quartz glass with a specification of 30mm×30mm×3mm is selected as the substrate of the thin film. Pretreatment of ...

Embodiment 3

[0026] The test alloy targets were selected from four metal elements with a purity of 99.99at.%-Ni, 99.95at.%-Mn, 99.99at.%-In, and 99.95at.%-Co. According to the molar ratio, 50 parts of Ni, 34 parts of Mn, 12 parts of In and 4 parts of Co are placed in a vacuum non-consumable electrode electric arc furnace. Before melting, the furnace cavity is evacuated to a degree of 5×10 -3 Pa, filled with Ar protective gas. In order to make the composition of the material uniform, the material is turned over by a manipulator before each smelting, and the smelting is turned over at least 4 times, and magnetic stirring is added during the smelting process. After smelting, an ingot with a diameter of 50 mm was obtained. After being ground on the grinding wheel, the ingot was placed on a wire electric discharge machine and cut into a circular target with a diameter of 3mm×2mm. Quartz glass with a specification of 30mm×30mm×3mm is selected as the substrate of the thin film. Pretreatment of...

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Abstract

The invention relates to a manufacturing method for a Ni50Mn34In12Co4 alloy film of high smoothness. The method includes the following steps that metal elements of Ni, Mn, In and Co are prepared according to the mol fractional ratio of 50:34:12:4 and placed in a vacuum nonconsumable electrode electric-arc furnace to be smelted; the electric-arc furnace is vacuumized to be of 5*10-3 Pa, and is filled with shielding gas to obtain a round target; a processed substrate and the target are placed in a vacuum system, the vacuum system is vacuumized to be of 1.0*10-4 Pa, and the distance between the substrate and the target is 3-5 cm; a laser device emits laser, the control frequency is 3-4 Hz, sputtering is conducted for 1-3 h, and a film of the required thickness is obtained; and the film is subjected to annealing for 0.5-3 h at the temperature of 800-900 DEG C, and then Ni50Mn34In12Co4 ferromagnetism shape memory alloy film of the high smoothness is obtained. The Ni50Mn34In12Co4 alloy film prepared according to the method has more accurate ingredients, lower roughness and good anisotropism. The alloy film is good in toughness, high in strength and easy to prepare and produce industrially, and is of great practical value on micro intelligence and high integration.

Description

technical field [0001] The invention belongs to the technical field of metal alloys, and relates to a Ni alloy with high flatness 50 mn 34 In 12 co 4 Alloy film preparation method. Background technique [0002] Ni-Co-Mn-In single crystal can undergo martensitic reverse phase transformation under the action of a magnetic field, which can completely restore the 3% pre-compression strain. The theoretical output stress in this process can reach 108 MPa, which is higher than that of Ni-Mn- The output stress of Ga is two orders of magnitude higher, and this research brings a huge step towards the practical application of magnetically actuated shape memory alloys. However, the complex preparation process and high cost of single crystal materials limit their wide application to a certain extent. However, the Ni-Mn-Co-In polycrystalline grains have different grain orientations, and there is strain coordination between adjacent grains, so the maximum reversible strain in the shap...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/18
Inventor 董桂馥
Owner DALIAN UNIV
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