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A kind of Si-based flexible stainless steel structure solar cell and preparation method

A technology of solar cells and stainless steel, applied in circuits, photovoltaic power generation, electrical components, etc., can solve problems such as poor corrosion resistance of thin-film solar cells, achieve the effects of improving photoelectric conversion efficiency, improving stability, and increasing market competitiveness

Active Publication Date: 2017-10-13
许昌国晟科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is to provide a Si-based flexible stainless steel structure solar cell and a preparation method that solves the principle of poor corrosion resistance of thin-film solar cells and improves the service life of thin-film solar cells

Method used

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  • A kind of Si-based flexible stainless steel structure solar cell and preparation method
  • A kind of Si-based flexible stainless steel structure solar cell and preparation method
  • A kind of Si-based flexible stainless steel structure solar cell and preparation method

Examples

Experimental program
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Effect test

Embodiment 1

[0031] see figure 1 combine figure 2 ,

[0032] (1), the stainless steel flexible substrate substrate was first cleaned with ion water for 5 minutes, then dried with nitrogen and sent to the PECVD reaction chamber, at 8.0×10 -4 Under the condition of Pa vacuum, the diamond anti-corrosion insulating layer is prepared by deposition. The process parameter conditions are: hydrogen and methane are used as the mixed gas reaction source, the flow ratio of hydrogen and methane is 20:1, the substrate temperature is 300°C, and the deposition time is 10 minutes.

[0033](2) Then send it to the magnetron sputtering reaction chamber to deposit and prepare the BCN insulating layer. The process parameter conditions are: nitrogen and methane as the mixed gas reaction source, the flow ratio of nitrogen and methane is 2:1, the purity of the boron target for reactive sputtering is 99.99%, the substrate temperature is 100°C, and the deposition time is 30 minutes.

[0034] (3), and then prepa...

Embodiment 2

[0041] (1), the stainless steel flexible substrate substrate was first cleaned with ion water for 5 minutes, then dried with nitrogen and sent to the PECVD reaction chamber, at 8.0×10 -4 Under the condition of Pa vacuum, the diamond anti-corrosion insulating layer is prepared by deposition. The process parameter conditions are: hydrogen and methane are used as the mixed gas reaction source, the flow ratio of hydrogen and methane is 20:1, the substrate temperature is 350°C, and the deposition time is 15 minutes.

[0042] (2) Then send it to the magnetron sputtering reaction chamber to deposit and prepare the BCN insulating layer. The process parameter conditions are: nitrogen and methane are used as the mixed gas reaction source, the nitrogen and methane flow ratio is 2:1, the purity of the reactive sputtering boron target is 99.99%, the substrate temperature is 150°C, and the deposition time is 40 minutes.

[0043] (3), and then prepare GZO-based transparent conductive film; ...

Embodiment 3

[0050] (1), the stainless steel flexible substrate substrate was first cleaned with ion water for 5 minutes, then dried with nitrogen and sent to the PECVD reaction chamber, at 8.0×10 -4 Under the condition of Pa vacuum, the diamond anti-corrosion insulating layer is prepared by deposition. The process parameter conditions are: hydrogen and methane are used as the mixed gas reaction source, the flow ratio of hydrogen and methane is 20:1, the substrate temperature is 450°C, and the deposition time is 16 minutes.

[0051] (2) Then send it to the magnetron sputtering reaction chamber to deposit and prepare the BCN insulating layer. The process parameter conditions are: nitrogen and methane as the mixed gas reaction source, the flow ratio of nitrogen and methane is 2:1, the purity of the reactive sputtering boron target is 99.99%, the substrate temperature is 150°C, and the deposition time is 50 minutes.

[0052] (3), and then prepare GZO-based transparent conductive film; its pr...

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Abstract

The invention belongs to the technical field of manufacturing of solar batteries, and in particular relates to a film solar battery of an Si-based flexible substrate added with a protective layer and a preparation method. The solar battery sequentially comprises a metal Ag electrode, an ITO (Indium Tin Oxide) transparent conductive film, an N-type Si crystal film, an intrinsic I-type nano-crystalline silicon film, a P-type nano-crystalline silicon film, a GZO (Gallium Zinc Oxide) transparent conductive film, a BCN (Boron Carbonitride) film insulated layer, a diamond protective film insulated layer and a stainless steel flexible substrate from top to bottom, wherein the intrinsic I-type nano-crystalline silicon film is used as an intermediate layer. According to the invention, the principle that the diamond film is combined with BCN is adopted; therefore, the problem of poor corrosion resistance of the film solar battery is solved; the service life of the film solar battery is prolonged; no any obvious film damage phenomenon exists through the method; thus, the photoelectric conversion efficiency of the solar battery is increased; and in addition, the stability of the photo-induced property of the solar battery is improved.

Description

technical field [0001] The invention belongs to the technical field of solar cell manufacturing, in particular to a thin-film solar cell with a Si-based flexible substrate added with a protective layer and a preparation method. Background technique [0002] The first-generation solar cells based on silicon crystals are currently in a dominant position in industrial production and the market due to their high conversion efficiency. However, due to the need to consume a large amount of raw materials, it has become a major obstacle to the development of solar cells. In order to save raw materials and further promote the development of solar cells, thin-film solar cells have become a research hotspot of solar cells in recent years. [0003] Traditional thin-film solar cell structures use rigid materials and tempered glass materials as substrates, which limits their application range. As the cost of solar cells becomes lower and lower, more and more such batteries are used in c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/0392H01L31/0224H01L31/077H01L31/18
CPCH01L31/022483H01L31/03926H01L31/077H01L31/1804Y02E10/547Y02P70/50
Inventor 张东
Owner 许昌国晟科技有限公司
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