Production method and equipment of diamond-like carbon powder

A technology of diamond powder and diamond-like film, applied in metal material coating process, gaseous chemical plating, coating and other directions to achieve excellent mechanical effect

Inactive Publication Date: 2015-11-25
刘南林
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Problems solved by technology

In order to solve the problem of producing powdery diamond-like film, the present invention, on the basis of the plasma vapor phase chemical deposition method, invented an organic polymer film as a diamond-like film deposition substrate, and then used an organic solvent to deposit the organic film of the diamond-like film. The dissolution of the polymer film can peel the diamond-like film from the substrate, precipitate it, and obtain po

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  • Production method and equipment of diamond-like carbon powder

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Embodiment Construction

[0010] The preferred scheme of the diamond-like powder production method and equipment includes: a production equipment manufacturing scheme and a production operation flow scheme.

[0011] The vacuum chamber (3) is made of a stainless steel cylinder with a diameter of about 1 meter, a length of about 2 meters and a wall thickness of 5 mm. One end of the cylinder is sealed, and the other end is a sealed door (5) with a sealing ring and a transparent glass viewing window (4) with a diameter of about 100 mm on the edge.

[0012] The interior of the vacuum chamber (3) is equipped with multi-layer arc-surface high-frequency electrodes (7), each layer of arc-surface high-frequency electrodes (7) has a length of about 1.5 meters and a width of about 0.5 meters, and is made of an aluminum plate with a thickness of about 2 mm. Rotatable rollers (13) consistent with the length of the arcuate high-frequency electrodes (7) are installed at both ends of each layer of arcuate high-frequenc...

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Abstract

The invention discloses production equipment of diamond-like carbon powder. The diamond-like carbon powder production equipment is designed through a plasma chemical vapor deposition diamond-like carbon film method, multilayer cambered-surface high-frequency electrodes, a soluble substrate and a continuous substrate moving device, and the aims of equipment for producing diamond-like carbon powder and uninterrupted continuous operating of the equipment are achieved. Therefore industrial production of diamond-like carbon powder is achieved. The performance of diamond-like carbon is not completely identical to that of diamond, and diamond-like carbon has excellent mechanical performance, chemical performance, optical performance, electrical performance and thermal performance, and belongs to functional materials in the field of new materials. Diamond-like carbon (DLC for short) powder can be applied to production raw materials for manufacturing grinding and polishing agents, chemical corrosion resisting surface treatment coatings, ultraviolet-proof coatings, inhibitor, sun protection skin cream, integrated circuit heat sink, high-energy capacitors, chemical catalysts, additives and other products. Diamond-like carbon has wide application prospects in the industry of spaceflight, war industry, electronics, machines, chemical engineering and the like.

Description

1. Technical field [0001] The present invention utilizes the diamond-like carbon powder method of plasma gas-phase chemical deposition, adopts the diamond-like powder production equipment designed by the multi-layer arc-surface high-frequency electrode, the soluble substrate and the substrate continuous moving device, and solves the problem of the industrialized production of diamond-like powder and its technical equipment. The problem of uninterrupted continuous operation. The performance of diamond-like carbon is not exactly the same as that of diamond. It has excellent mechanical, chemical, optical, electrical and thermal properties, and belongs to the functional material in the field of new materials. [0002] Diamond-like carbon (DLC) powder can be used in the manufacture of grinding and polishing agents, chemical corrosion-resistant surface treatment coatings, anti-ultraviolet coatings, anti-aging agents, sunscreen skin creams, integrated circuit heat sinks, high-energy ...

Claims

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Application Information

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IPC IPC(8): C23C16/27C23C16/513
Inventor 刘南林
Owner 刘南林
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