Production method and equipment of diamond-like carbon powder

Abstract

The invention discloses production equipment of diamond-like carbon powder. The diamond-like carbon powder production equipment is designed through a plasma chemical vapor deposition diamond-like carbon film method, multilayer cambered-surface high-frequency electrodes, a soluble substrate and a continuous substrate moving device, and the aims of equipment for producing diamond-like carbon powder and uninterrupted continuous operating of the equipment are achieved. Therefore industrial production of diamond-like carbon powder is achieved. The performance of diamond-like carbon is not completely identical to that of diamond, and diamond-like carbon has excellent mechanical performance, chemical performance, optical performance, electrical performance and thermal performance, and belongs to functional materials in the field of new materials. Diamond-like carbon (DLC for short) powder can be applied to production raw materials for manufacturing grinding and polishing agents, chemical corrosion resisting surface treatment coatings, ultraviolet-proof coatings, inhibitor, sun protection skin cream, integrated circuit heat sink, high-energy capacitors, chemical catalysts, additives and other products. Diamond-like carbon has wide application prospects in the industry of spaceflight, war industry, electronics, machines, chemical engineering and the like.

Description

1. Technical field [0001] The present invention utilizes the diamond-like carbon powder method of plasma gas-phase chemical deposition, adopts the diamond-like powder production equipment designed by the multi-layer arc-surface high-frequency electrode, the soluble substrate and the substrate continuous moving device, and solves the problem of the industrialized production of diamond-like powder and its technical equipment. The problem of uninterrupted continuous operation. The performance of diamond-like carbon is not exactly the same as that of diamond. It has excellent mechanical, chemical, optical, electrical and thermal properties, and belongs to the functional material in the field of new materials. [0002] Diamond-like carbon (DLC) powder can be used in the manufacture of grinding and polishing agents, chemical corrosion-resistant surface treatment coatings, anti-ultraviolet coatings, anti-aging agents, sunscreen skin creams, integrated circuit heat sinks, high-energy ...

AI Technical Summary

Problems solved by technology

In order to solve the problem of producing powdery diamond-like film, the present invention, on the basis of the plasma vapor phase chemical deposition method, invented an organic polymer film as a diamond-like film deposition substrate, and then used an organic solvent to deposit the organic film of the diamond-like film. The dissolution of the polymer film can peel the diamond-like film from the substrate, precipitate it, and obtain powdery diamond-like carbon after liquid-solid separation; invented a multi-layer arc-surface high-frequency electrode for plasma vapor-phase chemical deposition reaction , solved the problem of improving the production capacity of diamond-like powder production equipment; invented the diamond-like deposition substrate moving device, and solved the problem of uninterrupted and continuous operation of diamond-like powder production equipment

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