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Method for constructing organic liquid crystal molecule single-crystal micro-wire patterned array by nanoimprint technology

A technology of liquid crystal molecules and nano-imprinting, which is applied in the photoengraving process, opto-mechanical equipment, optics and other directions of the pattern surface. Effect

Inactive Publication Date: 2015-12-09
SUZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the shortage of large-area in the existing embossing, the purpose of the present invention is to provide a method for using the phase transition characteristics of liquid crystal molecules combined with the embossing method to construct a periodic, large-area micro-wire patterned array of organic small molecule single crystals , the method has the advantages of simple operation, wide application range, and strong universality. The obtained patterned arrayed small molecule organic micro-wires are large-area ordered, with strong pattern selectivity and easy operation.

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  • Method for constructing organic liquid crystal molecule single-crystal micro-wire patterned array by nanoimprint technology
  • Method for constructing organic liquid crystal molecule single-crystal micro-wire patterned array by nanoimprint technology
  • Method for constructing organic liquid crystal molecule single-crystal micro-wire patterned array by nanoimprint technology

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Embodiment Construction

[0039] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0040] Such as Figure 1-7 Shown, a kind of preferred embodiment of the present invention comprises the following steps:

[0041] Step a) cleaning of silicon wafer: get a part of SiO2 2 The / Si sheet was immersed in piranha solution for 3 hours, then ultrasonically cleaned with acetone, ethanol, and deionized water for 10 minutes, and finally dried with nitrogen.

[0042] Step b) photolithography: the cleaned SiO 2 / Si sheet is spin-coated with a certain thickness of positive resist, and then baked at 100°C for 3 minutes. With the help of a mask, use a photolithography machine to carve out the required pattern. After photolithography, the silicon oxide wafer is developed with a developer solution to obtain Graphics after lithography.

[0043] Step c) RIE etching: SiO after photolithography 2 The / Si sheet was etched in a reactiv...

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Abstract

The invention discloses a method for constructing an organic liquid crystal molecule single-crystal micro-wire patterned array by a nanoimprint technology. The method is divided into two parts; one part is a preparation of an imprint template; the other part is a preparation of an imprint base; the preparation of the imprint template comprises the following steps: firstly, cleaning a SiO2 / Si wafer base; secondly, carrying out positive photoresist photoetching and developing on the base to obtain an array pattern; thirdly, etching the photoetched SiO2 / Si wafer base by a reactive ion etching machine; fourthly removing the photoresist and obtaining an uneven template periodically arranged; fifthly spinning perfluorinated resin on the SiO2 / Si wafer base; and finally heating to finish the preparation of the imprint template; the preparation of the imprint base comprises the following steps: firstly, taking one cleaned SiO2 / Si wafer; secondly, lifting an organic small molecule membrane from the base on a step-by-step precision lifting platform to finish the preparation of the imprint base; the imprint template covers the base; certain pressure is applied; the imprint template is heated to the melting points of organic small molecules; heating is stopped after the temperature is kept constant for 15 minutes; the imprint template is cooled to room temperature; and the base is taken out, so as to obtain the periodic large-area organic small-molecule single-crystal micro-wire patterned array.

Description

technical field [0001] The invention discloses a method for constructing a periodic and large-area micron-line patterned array of organic small molecules by utilizing the phase transition characteristics of liquid crystal molecules and embossing. Specifically, the present invention relates to the preparation of periodically patterned and etched hydrophobic templates on the arrayed surface, and the preparation of bottom-up pulling organic small molecule films. Background technique [0002] The orientation of the one-dimensional single crystal structure ensures the uniformity of the application, which is an important issue in the future application of nano / micro single crystal electronics. Most electronic devices require one-dimensional structures with good orientation, and the position of one-dimensional single crystal materials can be precisely controlled to obtain expected performance. At present, the patterned arraying process commonly used in the industrial production of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/00
Inventor 揭建胜邓巍张秀娟商其勋
Owner SUZHOU UNIV
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