Method for constructing organic liquid crystal molecule single-crystal micro-wire patterned array by nanoimprint technology
A technology of liquid crystal molecules and nano-imprinting, which is applied in the photoengraving process, opto-mechanical equipment, optics and other directions of the pattern surface. Effect
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[0039] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.
[0040] Such as Figure 1-7 Shown, a kind of preferred embodiment of the present invention comprises the following steps:
[0041] Step a) cleaning of silicon wafer: get a part of SiO2 2 The / Si sheet was immersed in piranha solution for 3 hours, then ultrasonically cleaned with acetone, ethanol, and deionized water for 10 minutes, and finally dried with nitrogen.
[0042] Step b) photolithography: the cleaned SiO 2 / Si sheet is spin-coated with a certain thickness of positive resist, and then baked at 100°C for 3 minutes. With the help of a mask, use a photolithography machine to carve out the required pattern. After photolithography, the silicon oxide wafer is developed with a developer solution to obtain Graphics after lithography.
[0043] Step c) RIE etching: SiO after photolithography 2 The / Si sheet was etched in a reactiv...
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