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Spin-polarized current-driven submicron/nanomotor and manufacturing method thereof

A current-driven, spin-polarized technology, applied in nanotechnology, microstructure devices composed of components that move relative to each other, generators/motors, etc., can solve problems such as difficult integration and instability of microelectronic devices, To achieve the effect of stable structure and performance, easy integration

Active Publication Date: 2017-03-22
XIAN JIAOTONG LIVERPOOL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These nanoscale "motors" are small, but because they are biochemically driven, they are unstable and difficult to integrate with existing microelectronics

Method used

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  • Spin-polarized current-driven submicron/nanomotor and manufacturing method thereof
  • Spin-polarized current-driven submicron/nanomotor and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0042] Example: Fabrication of submicron / nanomotors driven by spin-polarized currents

[0043] Step 1, using standard photolithography-etching technology on the single crystal silicon wafer substrate to make strip-shaped grooves with a width of 2 microns;

[0044] Step 2, placing a metal cobalt nanowire with a length of 7 micrometers and a diameter of 50 nanometers on the trench;

[0045] Step 3, depositing two gold electrodes respectively on the silicon-based substrate and at the two ends of the metal cobalt nanowire. In this way, the two ends of the metal cobalt nanowires are fixed on the silicon substrate, and the middle main line segment of the metal cobalt nanowires is suspended above the trench to form a cantilever structure;

[0046] Step 4. Leading out the two gold electrodes with wires and connecting them to an AC power source, the spin-polarized current-driven submicron / nanomotor of the present invention is produced. figure 2 A scanning electron microscope image o...

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Abstract

The invention discloses a submicron / nano motor driven by spin-polarized current and a manufacturing method of the motor. The motor structurally comprises a silicon-based substrate provided with a groove, a magnetic metal nanowire and a power supply, wherein the magnetic metal nanowire is erected above the groove, the two ends of the nanowire are fixed to the silicon-based substrate through metal electrodes, and the power supply is connected with the metal electrodes through wires. The motor is simple and feasible in manufacturing process and stable in structure performance and can be easily integrated with an existing micro-electronic device, and the problems that in the prior art, a submicron / nano motor manufactured through the biologic or chemical method is unstable in structure performance and difficult to integrate with the existing micro-electronic device are solved.

Description

technical field [0001] The invention relates to a spin-polarized current-driven submicron / nanometer motor and a manufacturing method thereof. Background technique [0002] Submicron or nanoscale machinery and motors will have important applications in the future micro-electromechanical systems (MEMS, Micro-Electro-Mechanical System). Conventional photolithography and silicon micromachining prepare the actuation mechanisms often on the 10 to 100 micron scale. The nanoscale drive motors smaller than 1 micron are still in the laboratory research stage, and biological or chemical methods are mostly used, such as using ATP synthase to drive the motor. These nanoscale "motors" are small but, because they are biochemically driven, unstable and difficult to integrate with existing microelectronic devices. [0003] The present invention uses a simple polarizing (magnetizing) current to generate torque through magnetic nanowires mounted on conventional micron photolithographic elect...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B5/00B81C1/00B82Y40/00
Inventor 于昊
Owner XIAN JIAOTONG LIVERPOOL UNIV