Extrusion treatment method for high-purity aluminium target for liquid-crystal flat-panel display coating film

Abstract

The invention discloses an extrusion treatment method for a high-purity aluminium target for a liquid-crystal flat-panel display coating film. The extrusion treatment method comprises the following steps: selecting a high-purity solid aluminium ingot and heating the aluminium ingot to a semi-melted state, conveying the aluminium ingot into an extrusion machine through a transport rail, and slowly extruding the aluminium ingot from an outlet of the extrusion machine under the co-action of the extrusion machine and a die; obtaining a total deformation amount of 81.14% through measurement and calculation; carrying out annealing treatment on a cooled aluminium tube, refining grains, and improving a structure; and finally carrying out machining which comprises surface treatment, cutting and the like on the aluminium tube according to a drawing to obtain the finished product. The preparation method for the high-purity aluminium target is simple in process, and convenient and fast, thus increasing the efficiency; the prepared high-purity aluminium target has a fine-grain structure and has grain sizes of not greater than 200 [mu]m, and the structure is uniform and has a cubic texture, so that the sputtering speed of the high-purity aluminium target can be effectively increased; and an extrusion temperature, an extrusion speed and an extrusion pressure during an extrusion process form a closed-loop system, so as to further increase the extrusion speed and the production efficiency, and ensure the most excellent performance.

Description

technical field [0001] The invention relates to the C23C sputtering coating technology in the IPC classification, in particular to the high-purity aluminum target extrusion processing method used for the coating of liquid crystal flat panel displays. Background technique [0002] Liquid Crystal Display (LCD) and semiconductors are key industries actively promoted by the Chinese government. In recent years, the government has vigorously promoted the vigorous development of the panel industry, which has also driven the growth of demand for upstream raw materials for LCDs. Metal aluminum is a metal element that is very abundant on the earth. As a thin film material, metal aluminum and metal aluminum-based alloys have the advantages of low cost, low resistance, and good bonding with other film layers. Metal aluminum and its alloys are used as sputtering materials. The wiring material of the target has been widely used in panel manufacturing in the field of liquid crystal display...

AI Technical Summary

Problems solved by technology

The problem and disadvantage of this process is that it increases the bonding cost, and at the same time, due to the limitation of the bonding process, high-power continuous sputtering cannot be used, which affects the production cycle to a certain extent, resulting in a decrease in production capacity.

[0008] There are few existing technologies that are relatively close, and the published patent documents do not have good reference value