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Dynamic magnetic field self-sharpening finishing device for flexible magnetorheological finishing pad and finishing method for dynamic magnetic field self-sharpening finishing device

A flexible polishing and dynamic magnetic field technology, which is applied in the direction of grinding drive device, grinding/polishing equipment, abrasive surface adjustment device, etc., can solve the problems of losing workpiece pressure, reducing processing effect, and difficult to guarantee the processing shape accuracy, etc. It is easy to achieve Cleaning and space-saving effects

Active Publication Date: 2016-02-17
GUANGDONG UNIV OF TECH
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AI Technical Summary

Problems solved by technology

However, when using the magnetorheological polishing method to process flat workpieces, various types of magnetorheological machine tools developed by the U.S. QED company are mainly used. The principle is to place the workpiece above an arc-shaped polishing disc, and the surface of the workpiece and the polishing disc In the concave gap formed between them, an electromagnet pole or permanent magnet pole with adjustable magnetic induction intensity is arranged under the polishing disc to form a high-intensity gradient magnetic field in the concave gap. When the magnetorheological fluid moves with the polishing disc to the workpiece and the polishing disc The flexible raised "polished ribbon" formed near the formed gap, but the "polished ribbon" is in partial contact with the surface of the workpiece as "spots", and the only way to control the "spots" along the surface of the workpiece in a certain regular trajectory during processing Scanning can realize the processing of the entire surface, and the trajectory scanning process takes a lot of time, resulting in low efficiency and difficult to guarantee the accuracy of the processing shape
[0004] In order to improve the polishing efficiency of magnetorheology, the patent CN200610132495.9 proposes a magnetorheological effect-based grinding and polishing method and its polishing device based on the principle of magnetorheological polishing and the mechanism of cluster action, and has carried out a large number of experimental studies. Method Although the surface domain polishing pad is formed by the cluster method, the processing uniformity of the workpiece is difficult to solve. After in-depth analysis, due to the viscoelasticity of the magnetorheological fluid, the workpiece will be raised after passing through the patented magnetorheological polishing pad. The flexible polishing pad is pressed down and cannot be recovered, thus losing the pressure on the workpiece, which makes the material removal rate of the edge of the workpiece and other areas very different, and the abrasive is difficult to renew in the viscoelastic polishing pad, which further reduces the processing effect ( figure 1 shown)

Method used

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  • Dynamic magnetic field self-sharpening finishing device for flexible magnetorheological finishing pad and finishing method for dynamic magnetic field self-sharpening finishing device
  • Dynamic magnetic field self-sharpening finishing device for flexible magnetorheological finishing pad and finishing method for dynamic magnetic field self-sharpening finishing device
  • Dynamic magnetic field self-sharpening finishing device for flexible magnetorheological finishing pad and finishing method for dynamic magnetic field self-sharpening finishing device

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Embodiment 1

[0025] Such as image 3 As shown, a dynamic magnetic field self-sharpening polishing device for a magnetorheological flexible polishing pad of the present invention includes a polishing disc revolution mechanism and a multi-pole synchronous rotation drive mechanism. The polishing disc revolution mechanism includes a base 39, a transmission shaft motor 37, a transmission Shaft 13, adapter disc 11, eccentric shaft fixed disc 3, cup-shaped polishing disc 1, transmission shaft transmission mechanism, multi-pole synchronous rotation drive mechanism includes eccentric main shaft 43, synchronous rotation drive disc 8, flexible eccentric rotation shaft 19, eccentric Cover 20, magnetic pole 21, eccentric shaft fixed disk 3, main shaft motor 17, main shaft transmission mechanism, wherein the transmission shaft motor 37 is fixed on the base 39, and the active transmission part of the transmission shaft transmission mechanism is fixed on the output shaft of the transmission shaft motor 37,...

Embodiment 2

[0043] Such as image 3As shown, a dynamic magnetic field self-sharpening polishing device for a magnetorheological flexible polishing pad of the present invention includes a polishing disc revolution mechanism and a multi-magnetic pole synchronous rotation drive mechanism, and the polishing disc revolution mechanism is fixed by a base 39 and a tenth fixing screw 38 The transmission shaft motor 37 on the base 39, the transmission shaft driving pulley 50 fixed on the transmission shaft motor 37 by the second flat key 49, the bearing seat 16 that is vertically installed in the center of the base 39, and a bearing seat 16 that is installed in the bearing seat 16 The transmission shaft bearing 33, the bearing end cover 14 that is installed on the end face of the bearing seat 16 and compresses the outer ring of the transmission shaft bearing 33 through the fifth set screw 15, the inner fixed sleeve 34 and the outer fixed sleeve 35 that support the separation transmission bearing 33,...

Embodiment 3

[0058] The difference between the present invention and embodiment 1 is: the present invention is that the single crystal sapphire that diameter is 100mm is polished, the polishing method of the dynamic magnetic field self-sharpening polishing device of magnetorheological flexible polishing pad of the present invention, comprises the following steps:

[0059] 1) According to the characteristics of single crystal sapphire with a diameter of 100mm, select a magnetic pole 21 with a diameter of 15mm and a magnetic field strength of 3000Gs to be installed in the dynamic magnetic field self-sharpening device of the magnetorheological flexible polishing pad, and adjust the angle of the eccentric sleeve 20, Make each magnet rotation eccentric distance 53 be 1.5mm, as Figure 7 shown;

[0060] 2) A single crystal sapphire with a diameter of 100mm is installed on the tool head 62, the lower surface of the workpiece 61 is parallel to the upper end surface of the cup-shaped polishing disc...

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Abstract

The invention relates to a dynamic magnetic field self-sharpening finishing device for a flexible magnetorheological finishing pad and a finishing method for the dynamic magnetic field self-sharpening finishing device. The dynamic magnetic field self-sharpening finishing device comprises a finishing disk revolution mechanism and a multi-magnetic-pole synchronous rotation driving mechanism, wherein the finishing disk revolution mechanism comprises a driving shaft motor, a drive shaft, an adapting disk, an eccentric shaft fixing disk, a cup-like finishing disk and a driving shaft transmission mechanism; the multi-magnetic-pole synchronous rotation driving mechanism comprises an eccentric spindle, synchronous rotation driving plates, flexible eccentric rotating shafts, eccentric sleeves, magnetic poles, the eccentric shaft fixing disk, a spindle motor and the like. According to the finishing device and the finishing method disclosed by the invention, the conditions that a circulating device is adopted for updating magnetorheological fluid and the magnetorheological fluid is changed in the processing process are avoided, so that the space is saved, and the whole process from rough finishing to fine finishing can be realized by one-time processing; obtained workpieces are good in surface consistency, high in processing efficiency, free from of surface and subsurface damage and low in cost, so the finishing device and the finishing method are suitable for high-efficiency ultra-smooth uniform finishing processing of planes of large-diameter optical elements; meanwhile, the finishing device and the finishing method disclosed by the invention are also suitable for experimental researches such as a material removing mechanism and subsurface damage detection of optical planar materials.

Description

technical field [0001] The invention relates to a dynamic magnetic field self-sharpening polishing device for a magnetorheological flexible polishing pad and a polishing method thereof, which is particularly suitable for flattening processing of optoelectronic / microelectronic semiconductor substrates and optical elements, and belongs to the technical field of ultra-precision processing. Background technique [0002] Optical components (lenses, mirrors) are one of the core components of optical devices. In order to achieve good optical performance, the surface precision needs to be ultra-smooth (roughness Ra should be below 1nm), and the surface shape precision also has high requirements ( The shape accuracy reaches below 0.5 microns). In the LED field, single crystal silicon (Si), single crystal germanium (Ge), gallium arsenide (GaAs), single crystal silicon carbide (SiC) and sapphire (Al 2 o 3 ) etc., as semiconductor substrate materials, also require an ultra-flat and ul...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B1/00B24B47/12B24B53/02
CPCB24B1/005B24B1/00B24B47/12B24B53/02H05K999/99
Inventor 潘继生阎秋生高伟强于鹏
Owner GUANGDONG UNIV OF TECH
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