Silicon-based and quantum dot fully integrated image sensor and preparation method

Abstract

Disclosed are a silicon-based and quantum dot fully integrated image sensor and a preparation method. Silicon-based pixel units and quantum dot pixel units are integrated on a same silicon substrate, so the silicon-based image sensor can achieve imaging and detection for visible light; and an appropriate quantum dot material and an appropriate quantum dot size are selected, so an infrared high-sensitivity quantum dot thin film can be formed, imaging and detection for an infrared signal are achieved, and a photoelectric signal generated by the quantum dot thin film is controlled and read out on the basis that devices are formed on silicon bases. The quantum dot thin film pixel units and the silicon-based pixel units can achieve reuse of a readout circuit, the area of a chip is saved, and the difficulty of circuit design is reduced; the preparation method of the invention is compatible with CMOS image sensor process, the preparation method is in favor of single-chip manufacture of visible light and infrared image sensors, visible light and infrared detection technology combined wide spectrum detection and imaging technology is achieved, the complex degree of a product is simplified, and product cost is lowered.

Description

technical field [0001] The invention relates to the technical field of image sensors, in particular to an image sensor fully integrated with a silicon base and quantum dots and a preparation method thereof. Background technique [0002] An image sensor refers to a device that converts optical signals into electrical signals, which can be prepared based on charge-coupled device (CCD) technology, complementary metal-oxide-semiconductor (CMOS) image sensing technology, or quantum dot-based photodetection technology. [0003] CMOS image sensor refers to the image sensor technology processed on a silicon substrate using a CMOS process. Because of its low power consumption, low cost, mature technology, and compatibility with CMOS processes, it has been widely used in various fields. . CMOS image sensors are not only used in the field of consumer electronics, such as miniature digital cameras (DSC), mobile phone cameras, video cameras and digital single-lens reflex cameras (DSLR),...

AI Technical Summary

Problems solved by technology

This technology product requires at least two image sensor chips for visible light and short-wave infrared, which makes the entire optical path and system design very complicated

Moreover, short-wave infrared detection currently mainly uses short-wave infrared detector arrays composed of InGaAs infrared diodes, which are very expensive.

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