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High-density plasma generator

A technology of plasma and generating device, applied in the field of plasma generating device, can solve the problems of heavy equipment weight and high frequency, and achieve the effects of convenient maintenance, high density and convenient switching.

Active Publication Date: 2016-05-04
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0003] In order to solve the technical problems of heavy weight and high frequency of the existing plasma generator equipment, the present invention provides a high-density plasma generator. The invention adopts a closed plasma layer, and the plasma is filled in the tubular plasma device. Inside, the new high-density plasma generator has controllable switches, low energy consumption, reliable operation, and convenient maintenance. The generation and maintenance of plasma are relatively simple, which facilitates the wide application of plasma technology.

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Embodiment Construction

[0028] Such as figure 1 , figure 2 As shown, a new type of high-density plasma generator has a closed quartz tube (or other sealed structure), two electrodes 3 are packaged at both ends of the quartz tube 4, and the quartz tube is filled with working gas and working fluid. The high-voltage power sources 2 are combined into a high-density plasma generating device. The electrode material is selected from rare earth molybdenum electrodes, lanthanum tungsten electrodes or ternary rare earth tungsten electrodes (or other rare earth tungsten electrodes) that are resistant to high temperature and easy to radiate electrons. The quartz tube is filled with argon, neon, krypton, xenon, mercury vapor, alkali metal Steam (fill proportionally). Mains (or other power supply) generates thousands of volts of high voltage through a transformer, and is equipped with a frequency modulator to modulate the power frequency through the power switch 1. The output of the power supply is connected to...

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Abstract

The invention relates to a high-density plasma generator, which comprises a closed quartz tube, two electrodes and a power supply, wherein the two electrodes are packaged at two ends of the quartz tube; the quartz tube is filled with a working gas and a working medium; and the power supply is electrically connected with the two electrodes. In order to solve the technical problems that an existing plasma generator is heavy in weight and relatively high in frequency, by a closed plasma layer, plasmas are filled into a tubular plasma generator. The novel high-density plasma generator is controllable in switch, low in energy consumption, reliable to work and convenient to maintain; generation and maintenance of the plasmas are relatively simple; and wide application of a plasma technology is facilitated.

Description

technical field [0001] The invention relates to a novel high-density plasma generating device which can be used in the fields of electromagnetic wave absorption, plasma thin film technology and the like. Background technique [0002] The current plasma generating devices are heavy in weight and high in frequency, and are not suitable for wide application in the fields of aircraft stealth and component coating. Contents of the invention [0003] In order to solve the technical problems of heavy weight and high frequency of the existing plasma generator equipment, the present invention provides a high-density plasma generator. The invention adopts a closed plasma layer, and the plasma is filled in the tubular plasma device. Inside, the switch of the new high-density plasma generating device is controllable, low energy consumption, reliable operation, convenient maintenance, relatively simple generation and maintenance of plasma, and is convenient for the wide application of ...

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Application Information

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IPC IPC(8): H05H1/34
CPCH05H1/34
Inventor 周倩倩胡炜杰王红飞王浩静
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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